JPWO2005043150A1 - 弾性表面波センサー内蔵発振回路及びバイオセンサー装置 - Google Patents
弾性表面波センサー内蔵発振回路及びバイオセンサー装置 Download PDFInfo
- Publication number
- JPWO2005043150A1 JPWO2005043150A1 JP2005515092A JP2005515092A JPWO2005043150A1 JP WO2005043150 A1 JPWO2005043150 A1 JP WO2005043150A1 JP 2005515092 A JP2005515092 A JP 2005515092A JP 2005515092 A JP2005515092 A JP 2005515092A JP WO2005043150 A1 JPWO2005043150 A1 JP WO2005043150A1
- Authority
- JP
- Japan
- Prior art keywords
- acoustic wave
- surface acoustic
- wave sensor
- oscillation circuit
- built
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 148
- 230000010355 oscillation Effects 0.000 title claims abstract description 98
- 239000003990 capacitor Substances 0.000 claims abstract description 59
- 238000001514 detection method Methods 0.000 claims abstract description 39
- 239000013076 target substance Substances 0.000 claims abstract description 33
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 239000000126 substance Substances 0.000 claims abstract description 11
- 230000005284 excitation Effects 0.000 claims description 6
- 230000005669 field effect Effects 0.000 claims description 4
- 239000007788 liquid Substances 0.000 abstract description 24
- 239000010408 film Substances 0.000 description 21
- 238000010586 diagram Methods 0.000 description 10
- DSSYKIVIOFKYAU-XCBNKYQSSA-N (R)-camphor Chemical compound C1C[C@@]2(C)C(=O)C[C@@H]1C2(C)C DSSYKIVIOFKYAU-XCBNKYQSSA-N 0.000 description 4
- 241000723346 Cinnamomum camphora Species 0.000 description 4
- 239000000427 antigen Substances 0.000 description 4
- 102000036639 antigens Human genes 0.000 description 4
- 108091007433 antigens Proteins 0.000 description 4
- 229930008380 camphor Natural products 0.000 description 4
- 229960000846 camphor Drugs 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 238000012986 modification Methods 0.000 description 3
- 102000004169 proteins and genes Human genes 0.000 description 3
- 108090000623 proteins and genes Proteins 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 210000001124 body fluid Anatomy 0.000 description 2
- 239000010839 body fluid Substances 0.000 description 2
- 230000001965 increasing effect Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- LFYXNXGVLGKVCJ-FBIMIBRVSA-N 2-methylisoborneol Chemical compound C1C[C@@]2(C)[C@](C)(O)C[C@@H]1C2(C)C LFYXNXGVLGKVCJ-FBIMIBRVSA-N 0.000 description 1
- LFYXNXGVLGKVCJ-UHFFFAOYSA-N 2-methylisoborneol Natural products C1CC2(C)C(C)(O)CC1C2(C)C LFYXNXGVLGKVCJ-UHFFFAOYSA-N 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 210000004369 blood Anatomy 0.000 description 1
- 239000008280 blood Substances 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- DTGKSKDOIYIVQL-UHFFFAOYSA-N dl-isoborneol Natural products C1CC2(C)C(O)CC1C2(C)C DTGKSKDOIYIVQL-UHFFFAOYSA-N 0.000 description 1
- 230000014509 gene expression Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000012528 membrane Substances 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 239000002504 physiological saline solution Substances 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/36—Detecting the response signal, e.g. electronic circuits specially adapted therefor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/02—Analysing fluids
- G01N29/022—Fluid sensors based on microsensors, e.g. quartz crystal-microbalance [QCM], surface acoustic wave [SAW] devices, tuning forks, cantilevers, flexural plate wave [FPW] devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N29/00—Investigating or analysing materials by the use of ultrasonic, sonic or infrasonic waves; Visualisation of the interior of objects by transmitting ultrasonic or sonic waves through the object
- G01N29/22—Details, e.g. general constructional or apparatus details
- G01N29/24—Probes
- G01N29/2462—Probes with waveguides, e.g. SAW devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N5/00—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid
- G01N5/02—Analysing materials by weighing, e.g. weighing small particles separated from a gas or liquid by absorbing or adsorbing components of a material and determining change of weight of the adsorbent, e.g. determining moisture content
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
- H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
- H03B5/326—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator the resonator being an acoustic wave device, e.g. SAW or BAW device
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03B—GENERATION OF OSCILLATIONS, DIRECTLY OR BY FREQUENCY-CHANGING, BY CIRCUITS EMPLOYING ACTIVE ELEMENTS WHICH OPERATE IN A NON-SWITCHING MANNER; GENERATION OF NOISE BY SUCH CIRCUITS
- H03B5/00—Generation of oscillations using amplifier with regenerative feedback from output to input
- H03B5/30—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator
- H03B5/32—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator
- H03B5/36—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device
- H03B5/362—Generation of oscillations using amplifier with regenerative feedback from output to input with frequency-determining element being electromechanical resonator being a piezoelectric resonator active element in amplifier being semiconductor device the amplifier being a single transistor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/01—Indexing codes associated with the measuring variable
- G01N2291/014—Resonance or resonant frequency
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/02—Indexing codes associated with the analysed material
- G01N2291/025—Change of phase or condition
- G01N2291/0256—Adsorption, desorption, surface mass change, e.g. on biosensors
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N2291/00—Indexing codes associated with group G01N29/00
- G01N2291/04—Wave modes and trajectories
- G01N2291/042—Wave modes
- G01N2291/0423—Surface waves, e.g. Rayleigh waves, Love waves
Abstract
Description
2…LiTaO3基板
3…インターデジタル電極
4…反応膜
5…液体
6…検出対象物質
13,23…インターデジタル電極
14,15…反射器
31…弾性表面波センサー内蔵発振回路
32…弾性表面波センサー
32a,32b…第1,第2のポート
33,34…第1,第2のインターデジタル電極
35…トランジスタ
35a…ベース端子
35b…コレクタ端子
35c…リミッター端子
36…第1の直流カット用コンデンサ
37…インダクタンス素子
38,39…コンデンサ素子
40…接続点
41…抵抗
42…第2の直流カット用コンデンサ
43…インダクタンス素子
44,45…コンデンサ素子
46…抵抗
47…接続点
48…接続点
49…出力端子
50〜52…接続点
C1〜C4…コンデンサ素子
R1〜R5…抵抗素子
|S32|≧0(dB)・・・(1)
∠S32=360×n(deg)nは整数・・・(2)
Claims (7)
- 圧電基板と、圧電基板上に形成されている表面波励振用電極と、表面波励振用電極を覆うように、前記圧電基板上に形成されており、かつ検出対象物質または検出対象物質と結合する結合物質を結合する反応膜とを有し、微小な質量負荷を周波数変化により検出することを可能とする弾性表面波センサーが共振子として接続されている弾性表面波センサー内蔵発振回路であって、
前記弾性表面波センサーに対して直列に接続された直流カット用コンデンサを備え、該直流カット用コンデンサを有するインピーダンス整合回路が構成されていることを特徴とする、弾性表面波センサー内蔵発振回路。 - 前記インピーダンス整合回路が、前記直流カット用コンデンサに直列に接続されたインダクタンス素子と、該インダクタンス素子の両端とグラウンド電位との間にそれぞれ接続された第1,第2のコンデンサとを有する、請求項1に記載の弾性表面波センサー内蔵発振回路。
- 前記弾性表面波センサーと、前記直流カット用コンデンサとの間の接続点と、グラウンド電位との間に接続されている抵抗をさらに備える、請求項1または2に記載の弾性表面波センサー内蔵発振回路。
- 前記弾性表面波センサーが、2ポート型表面波共振子を用いて構成されている、請求項1〜3のいずれか1項に記載の弾性表面波センサー内蔵発振回路。
- 前記2ポート型表面波共振子を用いて構成された弾性表面波センサーが、第1,第2のポートを有し、
前記直流カット用コンデンサとして第1,第2の直流カット用コンデンサを有し、
前記インピーダンス整合回路として、第1,第2の端子を有し、第1の端子が前記第1のポートに接続されており、かつ前記第1の直流カット用コンデンサを含む第1のインピーダンス整合回路と、第1,第2の端子を有し、第1の端子が前記第2のポートに接続されており、かつ前記第2の直流カット用コンデンサを含む第2のインピーダンス整合回路とを有し、
前記第1のインピーダンス整合回路の第2の端子及び前記第2のインピーダンス整合回路の第2の端子に接続されているトランジスタをさらに備える、請求項4に記載の弾性表面波センサー内蔵発振回路。 - 前記トランジスタとして、電界効果型トランジスタが用いられている、請求項5に記載の弾性表面波センサー内蔵発振回路。
- 請求項1〜6のいずれか1項に記載の弾性表面波センサー内蔵発振回路を用いて構成されていることを特徴とするバイオセンサー装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2003372207 | 2003-10-31 | ||
JP2003372207 | 2003-10-31 | ||
PCT/JP2004/013072 WO2005043150A1 (ja) | 2003-10-31 | 2004-09-08 | 弾性表面波センサー内蔵発振回路及びバイオセンサー装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2005043150A1 true JPWO2005043150A1 (ja) | 2007-11-29 |
JP4325624B2 JP4325624B2 (ja) | 2009-09-02 |
Family
ID=34543996
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2005515092A Expired - Fee Related JP4325624B2 (ja) | 2003-10-31 | 2004-09-08 | 弾性表面波センサー内蔵発振回路及びバイオセンサー装置 |
Country Status (6)
Country | Link |
---|---|
US (1) | US7394180B2 (ja) |
EP (1) | EP1679512A4 (ja) |
JP (1) | JP4325624B2 (ja) |
KR (1) | KR100706520B1 (ja) |
CN (1) | CN100498328C (ja) |
WO (1) | WO2005043150A1 (ja) |
Families Citing this family (16)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN1924578B (zh) * | 2006-08-14 | 2010-12-29 | 佛山分析仪有限公司 | 一种压电蛋白芯片分析仪 |
WO2008095493A1 (en) * | 2007-02-06 | 2008-08-14 | Atonomics A/S | Reporter unit for detection of target molecules using polymerisable substrate |
KR100941684B1 (ko) * | 2007-08-30 | 2010-02-12 | 한국표준과학연구원 | Pmn-pt 압전 단결정을 이용한 고감쇠 재료 비파괴검사용 초음파 탐촉자 |
GB0809237D0 (en) * | 2008-05-21 | 2008-06-25 | Vivacta Ltd | A sensor |
FI121898B (fi) | 2008-07-01 | 2011-05-31 | Valtion Teknillinen | Menetelmä ja laite impedanssin mittaamiseksi |
CN101403724B (zh) * | 2008-10-08 | 2011-12-21 | 湖南大学 | 用于血样中微生物快速检测的仪器、试剂及制备方法 |
US8508100B2 (en) | 2008-11-04 | 2013-08-13 | Samsung Electronics Co., Ltd. | Surface acoustic wave element, surface acoustic wave device and methods for manufacturing the same |
CN101894451B (zh) * | 2009-05-21 | 2013-10-16 | 晨星软件研发(深圳)有限公司 | 无源遥控装置和遥控方法 |
KR101103578B1 (ko) * | 2009-09-30 | 2012-01-09 | 주식회사 캔티스 | 캔틸레버 센서 |
JPWO2011062032A1 (ja) * | 2009-11-19 | 2013-04-04 | 株式会社村田製作所 | 発振回路およびセンサ |
US7964144B1 (en) * | 2010-01-14 | 2011-06-21 | International Islamic University Malaysia | MEMS biosensor with integrated impedance and mass-sensing capabilities |
JP6288760B2 (ja) * | 2013-11-20 | 2018-03-07 | 日本電波工業株式会社 | 弾性表面波デバイス、共振子及び発振回路 |
CN110178024B (zh) * | 2017-10-16 | 2022-12-06 | 法国国家科学研究中心 | 具有带有高电子迁移率晶体管和环形谐振器的传感器单元的检测传感器 |
CN109499828B (zh) * | 2018-12-26 | 2024-01-30 | 中国科学院声学研究所 | 一种空耦式压电超声换能器及其等效电路模型 |
WO2020264242A1 (en) * | 2019-06-26 | 2020-12-30 | The Board Of Trustees Of The University Of Illinois | Mass-sensing instrument |
CN114050842B (zh) * | 2022-01-12 | 2022-05-03 | 南通大学 | 一种海上风力等级测量射频收发系统及其工作方法 |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH07119375B2 (ja) * | 1987-10-01 | 1995-12-20 | 関西ペイント株式会社 | ポジ型感光性アニオン電着塗料組成物 |
JPH0260211A (ja) | 1988-08-25 | 1990-02-28 | Alps Electric Co Ltd | 発振回路および発振回路の発振周波数の安定度を確認する方法 |
JPH02164121A (ja) | 1988-12-16 | 1990-06-25 | Murata Mfg Co Ltd | 弾性表面波装置 |
JPH02306706A (ja) * | 1989-05-22 | 1990-12-20 | Murata Mfg Co Ltd | 弾性表面波発振器 |
JPH04148844A (ja) | 1990-10-12 | 1992-05-21 | Sanyo Electric Co Ltd | 酸素ガスセンサ |
JPH1090270A (ja) | 1996-09-19 | 1998-04-10 | Shoji Hatano | 2−メチルイソボルネオールの検出方法 |
DE19746261A1 (de) * | 1997-10-20 | 1999-04-29 | Karlsruhe Forschzent | Sensor |
JP2004304766A (ja) * | 2003-03-17 | 2004-10-28 | Seiko Epson Corp | 発振回路およびその調整方法並びにそれを用いた質量測定装置 |
-
2004
- 2004-09-08 EP EP04787755A patent/EP1679512A4/en not_active Withdrawn
- 2004-09-08 WO PCT/JP2004/013072 patent/WO2005043150A1/ja active IP Right Grant
- 2004-09-08 JP JP2005515092A patent/JP4325624B2/ja not_active Expired - Fee Related
- 2004-09-08 US US10/595,317 patent/US7394180B2/en not_active Expired - Fee Related
- 2004-09-08 CN CNB2004800323290A patent/CN100498328C/zh not_active Expired - Fee Related
- 2004-09-08 KR KR1020067008236A patent/KR100706520B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
EP1679512A4 (en) | 2011-03-16 |
JP4325624B2 (ja) | 2009-09-02 |
CN100498328C (zh) | 2009-06-10 |
WO2005043150A1 (ja) | 2005-05-12 |
KR20060085251A (ko) | 2006-07-26 |
EP1679512A1 (en) | 2006-07-12 |
US20070252475A1 (en) | 2007-11-01 |
KR100706520B1 (ko) | 2007-04-13 |
CN1875268A (zh) | 2006-12-06 |
US7394180B2 (en) | 2008-07-01 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4325624B2 (ja) | 弾性表面波センサー内蔵発振回路及びバイオセンサー装置 | |
US10261078B2 (en) | Shear horizontal surface acoustic wave (SH-SAW) resonators and arrays thereof | |
US6033852A (en) | Monolithic piezoelectric sensor (MPS) for sensing chemical, biochemical and physical measurands | |
JP4900387B2 (ja) | 液中物質検出センサ | |
JP4702452B2 (ja) | 液中物質検出センサ | |
JP4181579B2 (ja) | 質量測定方法および質量測定用圧電振動片の励振回路並びに質量測定装置 | |
US20060254356A1 (en) | Wireless and passive acoustic wave liquid conductivity sensor | |
JP2004304766A (ja) | 発振回路およびその調整方法並びにそれを用いた質量測定装置 | |
EP2529207B1 (en) | Bi-stable oscillator | |
CN105431734B (zh) | 信号增强的薄膜体声波谐振器 | |
US7543476B2 (en) | Rupture event sensors | |
CN107250794A (zh) | 具有信号增强的薄膜体声波谐振器 | |
JPWO2005003752A1 (ja) | 弾性表面波センサー | |
CN108933579B (zh) | 一种声表面波单端对谐振器 | |
KR101638811B1 (ko) | 발진 방식을 이용한 표면탄성파 센서 시스템 및 이를 이용한 검출방법 | |
EP3818371A1 (en) | Bulk acoustic wave resonator with increased dynamic range | |
JP2000214140A (ja) | センサ | |
Vellekoop et al. | All-silicon plate wave oscillator system for sensors | |
JP2015190768A (ja) | センサ | |
WO2018140011A1 (en) | Shear horizontal surface acoustic wave (sh-saw) resonators and arrays thereof | |
Kim et al. | Development of biosensor using surface acoustic wave | |
JPH09178713A (ja) | 超音波濃度センサ | |
Day et al. | Biosensor | |
JPWO2011062032A1 (ja) | 発振回路およびセンサ |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20090217 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20090417 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20090519 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20090601 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20120619 Year of fee payment: 3 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20130619 Year of fee payment: 4 |
|
LAPS | Cancellation because of no payment of annual fees |