JPS649878A - Bonding between silicon nitride ceramics and metal - Google Patents

Bonding between silicon nitride ceramics and metal

Info

Publication number
JPS649878A
JPS649878A JP62163988A JP16398887A JPS649878A JP S649878 A JPS649878 A JP S649878A JP 62163988 A JP62163988 A JP 62163988A JP 16398887 A JP16398887 A JP 16398887A JP S649878 A JPS649878 A JP S649878A
Authority
JP
Japan
Prior art keywords
si3n4
vacuum
metal
torr
bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62163988A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0472793B2 (enrdf_load_stackoverflow
Inventor
Hirohiko Nakada
Masaaki Honda
Masaya Miyake
Takeya Motoyoshi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP62163988A priority Critical patent/JPS649878A/ja
Publication of JPS649878A publication Critical patent/JPS649878A/ja
Publication of JPH0472793B2 publication Critical patent/JPH0472793B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Pressure Welding/Diffusion-Bonding (AREA)
  • Ceramic Products (AREA)
JP62163988A 1987-07-02 1987-07-02 Bonding between silicon nitride ceramics and metal Granted JPS649878A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62163988A JPS649878A (en) 1987-07-02 1987-07-02 Bonding between silicon nitride ceramics and metal

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62163988A JPS649878A (en) 1987-07-02 1987-07-02 Bonding between silicon nitride ceramics and metal

Publications (2)

Publication Number Publication Date
JPS649878A true JPS649878A (en) 1989-01-13
JPH0472793B2 JPH0472793B2 (enrdf_load_stackoverflow) 1992-11-19

Family

ID=15784626

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62163988A Granted JPS649878A (en) 1987-07-02 1987-07-02 Bonding between silicon nitride ceramics and metal

Country Status (1)

Country Link
JP (1) JPS649878A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05117842A (ja) * 1991-10-25 1993-05-14 Ulvac Japan Ltd 金属とセラミツクスの接合法
JPH0632669A (ja) * 1992-07-15 1994-02-08 Toshiba Corp 接合体、メタライズ体およびメタライズ体の製造方法
JP2006522454A (ja) * 2003-03-30 2006-09-28 リットン・システムズ・インコーポレイテッド マイクロチャネルプレートの拡散接合方法
KR20170048999A (ko) * 2015-10-27 2017-05-10 주식회사 아모센스 세라믹 기판 제조 방법 및 이 제조방법으로 제조된 세라믹 기판
JP2020145335A (ja) * 2019-03-07 2020-09-10 株式会社Ｆｊコンポジット 回路基板の製造方法

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60177635A (ja) * 1984-02-24 1985-09-11 Toshiba Corp 良熱伝導性基板の製造方法
JPS63190773A (ja) * 1987-02-02 1988-08-08 住友電気工業株式会社 接合強度の優れたセラミツクスと金属の接合体

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60177635A (ja) * 1984-02-24 1985-09-11 Toshiba Corp 良熱伝導性基板の製造方法
JPS63190773A (ja) * 1987-02-02 1988-08-08 住友電気工業株式会社 接合強度の優れたセラミツクスと金属の接合体

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05117842A (ja) * 1991-10-25 1993-05-14 Ulvac Japan Ltd 金属とセラミツクスの接合法
JPH0632669A (ja) * 1992-07-15 1994-02-08 Toshiba Corp 接合体、メタライズ体およびメタライズ体の製造方法
JP2006522454A (ja) * 2003-03-30 2006-09-28 リットン・システムズ・インコーポレイテッド マイクロチャネルプレートの拡散接合方法
EP1617966A4 (en) * 2003-03-30 2008-09-10 Litton Systems Inc DIFFUSION BONDING METHOD FOR MICROCANAL ROLLERS
KR20170048999A (ko) * 2015-10-27 2017-05-10 주식회사 아모센스 세라믹 기판 제조 방법 및 이 제조방법으로 제조된 세라믹 기판
JP2020145335A (ja) * 2019-03-07 2020-09-10 株式会社Ｆｊコンポジット 回路基板の製造方法

Also Published As

Publication number Publication date
JPH0472793B2 (enrdf_load_stackoverflow) 1992-11-19

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term