JPS649732B2 - - Google Patents
Info
- Publication number
- JPS649732B2 JPS649732B2 JP56163213A JP16321381A JPS649732B2 JP S649732 B2 JPS649732 B2 JP S649732B2 JP 56163213 A JP56163213 A JP 56163213A JP 16321381 A JP16321381 A JP 16321381A JP S649732 B2 JPS649732 B2 JP S649732B2
- Authority
- JP
- Japan
- Prior art keywords
- wire
- light
- bonding
- metal substrate
- posture
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10W72/0711—
-
- H10W72/07141—
-
- H10W72/075—
-
- H10W72/07521—
-
- H10W72/07531—
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- H10W72/536—
-
- H10W72/5363—
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- H10W72/932—
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- H10W90/756—
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Wire Bonding (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56163213A JPS5863144A (ja) | 1981-10-12 | 1981-10-12 | ボンデイングワイヤ姿勢検査方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56163213A JPS5863144A (ja) | 1981-10-12 | 1981-10-12 | ボンデイングワイヤ姿勢検査方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5863144A JPS5863144A (ja) | 1983-04-14 |
| JPS649732B2 true JPS649732B2 (cg-RX-API-DMAC10.html) | 1989-02-20 |
Family
ID=15769443
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56163213A Granted JPS5863144A (ja) | 1981-10-12 | 1981-10-12 | ボンデイングワイヤ姿勢検査方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5863144A (cg-RX-API-DMAC10.html) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07114228B2 (ja) * | 1986-09-06 | 1995-12-06 | ロ−ム株式会社 | ワイヤボンデイング不良検出方法およびこれに用いる装置 |
| JPH07109850B2 (ja) * | 1989-01-18 | 1995-11-22 | 日本電気株式会社 | 半導体のボンディング装置 |
| US5298989A (en) * | 1990-03-12 | 1994-03-29 | Fujitsu Limited | Method of and apparatus for multi-image inspection of bonding wire |
-
1981
- 1981-10-12 JP JP56163213A patent/JPS5863144A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5863144A (ja) | 1983-04-14 |
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