JPS648689A - Semiconductor laser array element and manufacture thereof - Google Patents

Semiconductor laser array element and manufacture thereof

Info

Publication number
JPS648689A
JPS648689A JP16446787A JP16446787A JPS648689A JP S648689 A JPS648689 A JP S648689A JP 16446787 A JP16446787 A JP 16446787A JP 16446787 A JP16446787 A JP 16446787A JP S648689 A JPS648689 A JP S648689A
Authority
JP
Japan
Prior art keywords
layer
type
grooves
groove
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP16446787A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0579194B2 (enrdf_load_stackoverflow
Inventor
Hiroyuki Hosobane
Kaneki Matsui
Mototaka Tanetani
Akihiro Matsumoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sharp Corp
Original Assignee
Sharp Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sharp Corp filed Critical Sharp Corp
Priority to JP16446787A priority Critical patent/JPS648689A/ja
Priority to US07/195,742 priority patent/US4903274A/en
Publication of JPS648689A publication Critical patent/JPS648689A/ja
Publication of JPH0579194B2 publication Critical patent/JPH0579194B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Lasers (AREA)
JP16446787A 1987-05-19 1987-06-30 Semiconductor laser array element and manufacture thereof Granted JPS648689A (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP16446787A JPS648689A (en) 1987-06-30 1987-06-30 Semiconductor laser array element and manufacture thereof
US07/195,742 US4903274A (en) 1987-05-19 1988-05-18 Semiconductor laser array device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16446787A JPS648689A (en) 1987-06-30 1987-06-30 Semiconductor laser array element and manufacture thereof

Publications (2)

Publication Number Publication Date
JPS648689A true JPS648689A (en) 1989-01-12
JPH0579194B2 JPH0579194B2 (enrdf_load_stackoverflow) 1993-11-01

Family

ID=15793734

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16446787A Granted JPS648689A (en) 1987-05-19 1987-06-30 Semiconductor laser array element and manufacture thereof

Country Status (1)

Country Link
JP (1) JPS648689A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5042044A (en) * 1989-04-28 1991-08-20 Sharp Kabushiki Kaisha Semiconductor laser device, a semiconductor wafer

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6016484A (ja) * 1983-07-08 1985-01-28 Agency Of Ind Science & Technol 半導体レ−ザ

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6016484A (ja) * 1983-07-08 1985-01-28 Agency Of Ind Science & Technol 半導体レ−ザ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5042044A (en) * 1989-04-28 1991-08-20 Sharp Kabushiki Kaisha Semiconductor laser device, a semiconductor wafer

Also Published As

Publication number Publication date
JPH0579194B2 (enrdf_load_stackoverflow) 1993-11-01

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