JPS648625A - Detection of end point of gas etching - Google Patents

Detection of end point of gas etching

Info

Publication number
JPS648625A
JPS648625A JP16472887A JP16472887A JPS648625A JP S648625 A JPS648625 A JP S648625A JP 16472887 A JP16472887 A JP 16472887A JP 16472887 A JP16472887 A JP 16472887A JP S648625 A JPS648625 A JP S648625A
Authority
JP
Japan
Prior art keywords
etching
substrate
end point
gas
electrode plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP16472887A
Other languages
English (en)
Inventor
Akinori Iwasaki
Daigoro Okubo
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
Original Assignee
Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP16472887A priority Critical patent/JPS648625A/ja
Publication of JPS648625A publication Critical patent/JPS648625A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Drying Of Semiconductors (AREA)
JP16472887A 1987-06-30 1987-06-30 Detection of end point of gas etching Pending JPS648625A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16472887A JPS648625A (en) 1987-06-30 1987-06-30 Detection of end point of gas etching

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16472887A JPS648625A (en) 1987-06-30 1987-06-30 Detection of end point of gas etching

Publications (1)

Publication Number Publication Date
JPS648625A true JPS648625A (en) 1989-01-12

Family

ID=15798771

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16472887A Pending JPS648625A (en) 1987-06-30 1987-06-30 Detection of end point of gas etching

Country Status (1)

Country Link
JP (1) JPS648625A (ja)

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