JPS6484728A - Alignment - Google Patents
AlignmentInfo
- Publication number
- JPS6484728A JPS6484728A JP62242989A JP24298987A JPS6484728A JP S6484728 A JPS6484728 A JP S6484728A JP 62242989 A JP62242989 A JP 62242989A JP 24298987 A JP24298987 A JP 24298987A JP S6484728 A JPS6484728 A JP S6484728A
- Authority
- JP
- Japan
- Prior art keywords
- light
- aperture
- projected
- alignment
- advance
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Tests Of Electronic Circuits (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
PURPOSE:To make it possible to perform alignment between each probe needle at a probing card mounted vertically by probe needles and each electrode of an IC chip, by irradiating an optical light to an aperture which is provided at one object and performing alignment so that the light that is direction-controlled by the above aperture and the position of other object projected by the light may coincide with each other. CONSTITUTION:When the alignment of two objects 14 and 18 at least which are arranged in parallel is carried out, an optical light 17 is irradiated onto an aperture 7 which is provided at a position determined in advance for one of the objects at least and alignment is performed by causing the light which is direction-controlled by the aperture 7 to agree with the position determined in advance for other object 18 projected by the light. For example, a coherent light 17 coming from a semiconductor laser 16 is reflected by a half mirror 14 and is direction-controlled by the aperture 7 to project almost vertically with respect to the face of a wafer and then, its projected position is imaged by a CCD 15 camera. When an error in the projected position with respect to the position determined in advance appears, it is corrected to modify and then such a operation is repeated at two places of the projected position which are determined in advance on the wafer 10.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62242989A JP2554341B2 (en) | 1987-09-28 | 1987-09-28 | Probe device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62242989A JP2554341B2 (en) | 1987-09-28 | 1987-09-28 | Probe device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6484728A true JPS6484728A (en) | 1989-03-30 |
JP2554341B2 JP2554341B2 (en) | 1996-11-13 |
Family
ID=17097242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62242989A Expired - Lifetime JP2554341B2 (en) | 1987-09-28 | 1987-09-28 | Probe device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2554341B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03180769A (en) * | 1989-12-11 | 1991-08-06 | Kobe Steel Ltd | Probe for examination |
JP2002039738A (en) * | 2000-05-18 | 2002-02-06 | Advantest Corp | Position shift detecting method and position determining method, and position shift detecting device and position determining device for probe |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS541435A (en) * | 1977-06-06 | 1979-01-08 | Maenakaseisakushiyo Kk | External pressure actuated feed bypass selector device |
JPS59208741A (en) * | 1983-05-12 | 1984-11-27 | Mitsubishi Electric Corp | Attracting chuck device for semiconductor wafer |
JPS62190737A (en) * | 1986-02-17 | 1987-08-20 | Fujitsu Ltd | Low temperature auto-prober |
-
1987
- 1987-09-28 JP JP62242989A patent/JP2554341B2/en not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS541435A (en) * | 1977-06-06 | 1979-01-08 | Maenakaseisakushiyo Kk | External pressure actuated feed bypass selector device |
JPS59208741A (en) * | 1983-05-12 | 1984-11-27 | Mitsubishi Electric Corp | Attracting chuck device for semiconductor wafer |
JPS62190737A (en) * | 1986-02-17 | 1987-08-20 | Fujitsu Ltd | Low temperature auto-prober |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03180769A (en) * | 1989-12-11 | 1991-08-06 | Kobe Steel Ltd | Probe for examination |
JP2002039738A (en) * | 2000-05-18 | 2002-02-06 | Advantest Corp | Position shift detecting method and position determining method, and position shift detecting device and position determining device for probe |
Also Published As
Publication number | Publication date |
---|---|
JP2554341B2 (en) | 1996-11-13 |
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