JPS6484728A - Alignment - Google Patents

Alignment

Info

Publication number
JPS6484728A
JPS6484728A JP62242989A JP24298987A JPS6484728A JP S6484728 A JPS6484728 A JP S6484728A JP 62242989 A JP62242989 A JP 62242989A JP 24298987 A JP24298987 A JP 24298987A JP S6484728 A JPS6484728 A JP S6484728A
Authority
JP
Japan
Prior art keywords
light
aperture
projected
alignment
advance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62242989A
Other languages
Japanese (ja)
Other versions
JP2554341B2 (en
Inventor
Noboru Masuoka
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Ltd
Original Assignee
Tokyo Electron Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Ltd filed Critical Tokyo Electron Ltd
Priority to JP62242989A priority Critical patent/JP2554341B2/en
Publication of JPS6484728A publication Critical patent/JPS6484728A/en
Application granted granted Critical
Publication of JP2554341B2 publication Critical patent/JP2554341B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Landscapes

  • Tests Of Electronic Circuits (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

PURPOSE:To make it possible to perform alignment between each probe needle at a probing card mounted vertically by probe needles and each electrode of an IC chip, by irradiating an optical light to an aperture which is provided at one object and performing alignment so that the light that is direction-controlled by the above aperture and the position of other object projected by the light may coincide with each other. CONSTITUTION:When the alignment of two objects 14 and 18 at least which are arranged in parallel is carried out, an optical light 17 is irradiated onto an aperture 7 which is provided at a position determined in advance for one of the objects at least and alignment is performed by causing the light which is direction-controlled by the aperture 7 to agree with the position determined in advance for other object 18 projected by the light. For example, a coherent light 17 coming from a semiconductor laser 16 is reflected by a half mirror 14 and is direction-controlled by the aperture 7 to project almost vertically with respect to the face of a wafer and then, its projected position is imaged by a CCD 15 camera. When an error in the projected position with respect to the position determined in advance appears, it is corrected to modify and then such a operation is repeated at two places of the projected position which are determined in advance on the wafer 10.
JP62242989A 1987-09-28 1987-09-28 Probe device Expired - Lifetime JP2554341B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62242989A JP2554341B2 (en) 1987-09-28 1987-09-28 Probe device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62242989A JP2554341B2 (en) 1987-09-28 1987-09-28 Probe device

Publications (2)

Publication Number Publication Date
JPS6484728A true JPS6484728A (en) 1989-03-30
JP2554341B2 JP2554341B2 (en) 1996-11-13

Family

ID=17097242

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62242989A Expired - Lifetime JP2554341B2 (en) 1987-09-28 1987-09-28 Probe device

Country Status (1)

Country Link
JP (1) JP2554341B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03180769A (en) * 1989-12-11 1991-08-06 Kobe Steel Ltd Probe for examination
JP2002039738A (en) * 2000-05-18 2002-02-06 Advantest Corp Position shift detecting method and position determining method, and position shift detecting device and position determining device for probe

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS541435A (en) * 1977-06-06 1979-01-08 Maenakaseisakushiyo Kk External pressure actuated feed bypass selector device
JPS59208741A (en) * 1983-05-12 1984-11-27 Mitsubishi Electric Corp Attracting chuck device for semiconductor wafer
JPS62190737A (en) * 1986-02-17 1987-08-20 Fujitsu Ltd Low temperature auto-prober

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS541435A (en) * 1977-06-06 1979-01-08 Maenakaseisakushiyo Kk External pressure actuated feed bypass selector device
JPS59208741A (en) * 1983-05-12 1984-11-27 Mitsubishi Electric Corp Attracting chuck device for semiconductor wafer
JPS62190737A (en) * 1986-02-17 1987-08-20 Fujitsu Ltd Low temperature auto-prober

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03180769A (en) * 1989-12-11 1991-08-06 Kobe Steel Ltd Probe for examination
JP2002039738A (en) * 2000-05-18 2002-02-06 Advantest Corp Position shift detecting method and position determining method, and position shift detecting device and position determining device for probe

Also Published As

Publication number Publication date
JP2554341B2 (en) 1996-11-13

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