JPS6482577A - Manufacture of oxide superconducting material - Google Patents

Manufacture of oxide superconducting material

Info

Publication number
JPS6482577A
JPS6482577A JP62241875A JP24187587A JPS6482577A JP S6482577 A JPS6482577 A JP S6482577A JP 62241875 A JP62241875 A JP 62241875A JP 24187587 A JP24187587 A JP 24187587A JP S6482577 A JPS6482577 A JP S6482577A
Authority
JP
Japan
Prior art keywords
oxide superconducting
superconducting material
magnetic field
targets
magnetic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62241875A
Other languages
Japanese (ja)
Other versions
JP2683689B2 (en
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP62241875A priority Critical patent/JP2683689B2/en
Priority to US07/246,611 priority patent/US4963524A/en
Priority to CN88107590A priority patent/CN1019251B/en
Priority to EP19880308904 priority patent/EP0309294A3/en
Publication of JPS6482577A publication Critical patent/JPS6482577A/en
Application granted granted Critical
Publication of JP2683689B2 publication Critical patent/JP2683689B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Superconductors And Manufacturing Methods Therefor (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Physical Vapour Deposition (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)

Abstract

PURPOSE:To enable making a thin film of oxide superconducting material operating at a temperature higher than or equal to liquid nitrogen temperature, in the manner in which the crystal axis is aligned, by orienting crystal in the course of film forming by applying magnetic field between two targets, when the thin film of oxide superconducting material is made by using sputtering method. CONSTITUTION:A sputtering equipment to make an oxide superconducting material is provided with a pair of targets 20, 20', a magnetic field generating space 4, a doping system 5, and a discharging system 30. As to a magnetic circuit, a magnet 7 is N and a magnet 7' is S, which constitute a closed magnetic path except the magnetic field generating space, by using magnetic paths 33, 33' and a magnetic field generating coil 21. The surfaces to be formed of a plurality of substrates 1, 1 are arranged in parallel with magnetic field between the targets 20, 20' facing each other. For targets 5, 5', pressed oxide superconducting material is used, which is shown by the following; (A-xBx) yCuzOwXv x=0.1-1.0, y=2.0-4.0, z=2.0-4.5, w=4.0-8.0.
JP62241875A 1987-09-24 1987-09-24 Method for producing oxide superconducting thin film Expired - Fee Related JP2683689B2 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP62241875A JP2683689B2 (en) 1987-09-24 1987-09-24 Method for producing oxide superconducting thin film
US07/246,611 US4963524A (en) 1987-09-24 1988-09-20 Sputtering device for manufacturing superconducting oxide material and method therefor
CN88107590A CN1019251B (en) 1987-09-24 1988-09-24 Method of mfg. superconducting oxide ceramic material film
EP19880308904 EP0309294A3 (en) 1987-09-24 1988-09-26 Method and apparatus for the manufacture of superconducting oxide materials

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62241875A JP2683689B2 (en) 1987-09-24 1987-09-24 Method for producing oxide superconducting thin film

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP3094821A Division JPH04317408A (en) 1991-04-01 1991-04-01 Oxide superconducting material

Publications (2)

Publication Number Publication Date
JPS6482577A true JPS6482577A (en) 1989-03-28
JP2683689B2 JP2683689B2 (en) 1997-12-03

Family

ID=17080831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62241875A Expired - Fee Related JP2683689B2 (en) 1987-09-24 1987-09-24 Method for producing oxide superconducting thin film

Country Status (1)

Country Link
JP (1) JP2683689B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016056446A (en) * 2014-05-02 2016-04-21 株式会社半導体エネルギー研究所 Method for manufacturing oxide

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61194786A (en) * 1985-02-22 1986-08-29 Nippon Telegr & Teleph Corp <Ntt> Heat treatment method of oxide superconductor thin-film

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61194786A (en) * 1985-02-22 1986-08-29 Nippon Telegr & Teleph Corp <Ntt> Heat treatment method of oxide superconductor thin-film

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2016056446A (en) * 2014-05-02 2016-04-21 株式会社半導体エネルギー研究所 Method for manufacturing oxide

Also Published As

Publication number Publication date
JP2683689B2 (en) 1997-12-03

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees