JPS6479371A - Coating method with hard carbon film - Google Patents
Coating method with hard carbon filmInfo
- Publication number
- JPS6479371A JPS6479371A JP23462487A JP23462487A JPS6479371A JP S6479371 A JPS6479371 A JP S6479371A JP 23462487 A JP23462487 A JP 23462487A JP 23462487 A JP23462487 A JP 23462487A JP S6479371 A JPS6479371 A JP S6479371A
- Authority
- JP
- Japan
- Prior art keywords
- film
- carbon film
- hard carbon
- titanium nitride
- substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE:To improve the stability and reliability of a hard carbon film by coating a substrate with the carbon film after coating with an intermediate layer of dark-brown titanium nitride by vapor phase synthesis. CONSTITUTION:A dark-brown titanium nitride film as an intermediate layer is formed on a substrate by vapor phase synthesis and a hard carbon film as a second layer is formed on the intermediate layer by vapor phase synthesis. Since the titanium nitride film is formed under such conditions as a high flow rate of gaseous nitrogen and low plasma density, fine projections are obtd. on the surface of the film and the tips are made acicular. The hue of the titanium nitride film desirably satisfies 5<=a*<=10 and 9<=b*<=22. The saturation and lightness of the film desirably satisfy 11<=c*<=19 and 36<=L*<=47, respectively. The substrate can be coated with the hard carbon film having superior stability and reliability.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23462487A JPS6479371A (en) | 1987-09-18 | 1987-09-18 | Coating method with hard carbon film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP23462487A JPS6479371A (en) | 1987-09-18 | 1987-09-18 | Coating method with hard carbon film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6479371A true JPS6479371A (en) | 1989-03-24 |
Family
ID=16973957
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP23462487A Pending JPS6479371A (en) | 1987-09-18 | 1987-09-18 | Coating method with hard carbon film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6479371A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5455081A (en) * | 1990-09-25 | 1995-10-03 | Nippon Steel Corporation | Process for coating diamond-like carbon film and coated thin strip |
WO2007072658A1 (en) | 2005-12-21 | 2007-06-28 | Kabushiki Kaisha Riken | Amorphous hard carbon coating |
US8377830B2 (en) | 2006-02-23 | 2013-02-19 | Renesas Electronics Corporation | Method of manufacturing a semiconductor device and wet processing apparatus |
-
1987
- 1987-09-18 JP JP23462487A patent/JPS6479371A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5455081A (en) * | 1990-09-25 | 1995-10-03 | Nippon Steel Corporation | Process for coating diamond-like carbon film and coated thin strip |
WO2007072658A1 (en) | 2005-12-21 | 2007-06-28 | Kabushiki Kaisha Riken | Amorphous hard carbon coating |
US7955691B2 (en) | 2005-12-21 | 2011-06-07 | Kabushiki Kaisha Riken | Hard amorphous carbon film |
US8377830B2 (en) | 2006-02-23 | 2013-02-19 | Renesas Electronics Corporation | Method of manufacturing a semiconductor device and wet processing apparatus |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS52123172A (en) | Spin coating method | |
JPS55154565A (en) | Surface-covered sintered hard alloy member | |
JPS6479371A (en) | Coating method with hard carbon film | |
JPS54130437A (en) | Silver-palladium type alloy sputtered contact point | |
CA2037432A1 (en) | Method of and apparatus for preparing oxide superconducting film | |
JPS6479372A (en) | Coating method with hard carbon film | |
JPS57167133A (en) | Production for magnetic recording medium | |
GB1332878A (en) | Method of producing firmly bonded wear-resistant coat9ngs of metal nitride or carbonitride on metal parts | |
JPS53132310A (en) | Production of magnetic recording media | |
JPS5371182A (en) | Gas barrier polypropylene film | |
FR2415668A1 (en) | Throwaway long life carbide coated tool - with highest nitrogen and carbon contents respectively near substrate and outer surface (OE 15.3.79) | |
JPS5332888A (en) | Case for hand watch | |
JPS5556635A (en) | Preparation of surface top coat in semiconductor device | |
JPS5330678A (en) | Modified polypropylene composite films | |
JPS54145505A (en) | Magnetic recording medium | |
JPS5671831A (en) | Manufacture for magnetic recording medium | |
JPS6462457A (en) | Coating method with diamond film | |
JPS5694521A (en) | Magnetic disc | |
JPS578919A (en) | Manufacture of magnetic recording body | |
JPS5376981A (en) | Gas phase growth method | |
Gupalo | The Adsorption of Potassium on the(112) Face of a Molybdenum Crystal | |
JPS5622221A (en) | Protective film growing method for magnetic disk | |
JPS5650508A (en) | Manufacture monocrystalling semiconductor substrate and its | |
JPS57158048A (en) | Optical disk and its information recording method | |
IT1107224B (en) | Reed mouthpiece for woodwind instrument - has coating of fine particle suspension on end of and partially penetrating reed |