JPS64733A - Film formation method and device thereof - Google Patents

Film formation method and device thereof

Info

Publication number
JPS64733A
JPS64733A JP5370888A JP5370888A JPS64733A JP S64733 A JPS64733 A JP S64733A JP 5370888 A JP5370888 A JP 5370888A JP 5370888 A JP5370888 A JP 5370888A JP S64733 A JPS64733 A JP S64733A
Authority
JP
Japan
Prior art keywords
film formation
activating
space
gas
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5370888A
Other languages
English (en)
Other versions
JPH01733A (ja
Inventor
Katsumi Nakagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP5370888A priority Critical patent/JPS64733A/ja
Publication of JPH01733A publication Critical patent/JPH01733A/ja
Publication of JPS64733A publication Critical patent/JPS64733A/ja
Priority to US08/046,906 priority patent/US5269848A/en
Priority to US08/322,410 priority patent/US5874350A/en
Pending legal-status Critical Current

Links

JP5370888A 1987-03-20 1988-03-09 Film formation method and device thereof Pending JPS64733A (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP5370888A JPS64733A (en) 1987-03-20 1988-03-09 Film formation method and device thereof
US08/046,906 US5269848A (en) 1987-03-20 1993-04-15 Process for preparing a functional thin film by way of the chemical reaction among active species and apparatus therefor
US08/322,410 US5874350A (en) 1987-03-20 1994-10-13 Process for preparing a functional thin film by way of the chemical reaction among active species

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP6651887 1987-03-20
JP62-66518 1987-03-20
JP5370888A JPS64733A (en) 1987-03-20 1988-03-09 Film formation method and device thereof

Publications (2)

Publication Number Publication Date
JPH01733A JPH01733A (ja) 1989-01-05
JPS64733A true JPS64733A (en) 1989-01-05

Family

ID=26394421

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5370888A Pending JPS64733A (en) 1987-03-20 1988-03-09 Film formation method and device thereof

Country Status (1)

Country Link
JP (1) JPS64733A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5183510A (en) * 1988-11-30 1993-02-02 Fujitsu Limited Apparatus and process for chemical vapor deposition

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5183510A (en) * 1988-11-30 1993-02-02 Fujitsu Limited Apparatus and process for chemical vapor deposition

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