JPS6472985A - Apparatus for producing semiconductor single crystal - Google Patents
Apparatus for producing semiconductor single crystalInfo
- Publication number
- JPS6472985A JPS6472985A JP22861287A JP22861287A JPS6472985A JP S6472985 A JPS6472985 A JP S6472985A JP 22861287 A JP22861287 A JP 22861287A JP 22861287 A JP22861287 A JP 22861287A JP S6472985 A JPS6472985 A JP S6472985A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- single crystal
- transportation
- supporting base
- reinforcing material
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Abstract
PURPOSE:To prevent the failure, etc., of a crucible during the transportation thereof and to obtain a large-sized single crystal with good workability by fastening the crucible by means of a furnace member enclosing the crucible to integrate the crucible and further, providing holding parts for transportation to the furnace member. CONSTITUTION:The crucible 11 and a supporting base 12 which supports the crucible 11 are fastened and integrated by a reinforcing material 13 and thread working and further, the holding parts for transportation, for example, two holes 13' are provided to the crucible. A raw material is housed into such crucible 11 and the crucible is disposed in a high-pressure vessel 14. After the inside of the vessel is pressurized by gaseous Ar, the crucible 11 is heated by a heater 15 which coaxially encloses the crucible. A raw material 16 is thus obtd. A seed crystal 17 is then lowered and is held in contact with he melt 16; thereafter, the seed crystal 17 is pulled up while the crystal is kept rotated by which the single crystal is obtd. The supporting base 12 which houses the crucible 11 and is assembled with the reinforcing material 13 is taken in this state out of the high-pressure vessel 14 after the end of the production of the single crystal. The content remaining in the crucible 11 is taken out and the reinforcing material 13 is removed. The crucible 11 is taken out of the supporting base 12 and is cleaned.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62228612A JP2579951B2 (en) | 1987-09-14 | 1987-09-14 | Semiconductor single crystal manufacturing equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62228612A JP2579951B2 (en) | 1987-09-14 | 1987-09-14 | Semiconductor single crystal manufacturing equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6472985A true JPS6472985A (en) | 1989-03-17 |
JP2579951B2 JP2579951B2 (en) | 1997-02-12 |
Family
ID=16879075
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62228612A Expired - Lifetime JP2579951B2 (en) | 1987-09-14 | 1987-09-14 | Semiconductor single crystal manufacturing equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2579951B2 (en) |
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5327199A (en) * | 1992-08-20 | 1994-07-05 | Ricoh Company, Ltd. | Developing device for a color image forming apparatus |
US5372090A (en) * | 1991-09-12 | 1994-12-13 | Ringsdorff-Werke Gmbh | Multipart support crucible and method for producing the same |
JP2009056495A (en) * | 2007-08-31 | 2009-03-19 | Koyo Giken:Kk | Spot welding electrode |
US8248014B2 (en) | 2004-05-06 | 2012-08-21 | Mechoshade Systems, Inc. | Automated shade control system |
US8525462B2 (en) | 2005-03-08 | 2013-09-03 | Mechoshade Systems, Inc. | Automated shade control method and system |
US8723467B2 (en) | 2004-05-06 | 2014-05-13 | Mechoshade Systems, Inc. | Automated shade control in connection with electrochromic glass |
US8836263B2 (en) | 2004-05-06 | 2014-09-16 | Mechoshade Systems, Inc. | Automated shade control in connection with electrochromic glass |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6021900A (en) * | 1983-07-19 | 1985-02-04 | Agency Of Ind Science & Technol | Apparatus for preparing compound semiconductor single crystal |
-
1987
- 1987-09-14 JP JP62228612A patent/JP2579951B2/en not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6021900A (en) * | 1983-07-19 | 1985-02-04 | Agency Of Ind Science & Technol | Apparatus for preparing compound semiconductor single crystal |
Cited By (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5372090A (en) * | 1991-09-12 | 1994-12-13 | Ringsdorff-Werke Gmbh | Multipart support crucible and method for producing the same |
US5327199A (en) * | 1992-08-20 | 1994-07-05 | Ricoh Company, Ltd. | Developing device for a color image forming apparatus |
US8248014B2 (en) | 2004-05-06 | 2012-08-21 | Mechoshade Systems, Inc. | Automated shade control system |
US8432117B2 (en) | 2004-05-06 | 2013-04-30 | Mechoshade Systems, Inc. | Automated shade control system |
US8587242B2 (en) | 2004-05-06 | 2013-11-19 | Mechoshade Systems, Inc. | Automated shade control system |
US8723467B2 (en) | 2004-05-06 | 2014-05-13 | Mechoshade Systems, Inc. | Automated shade control in connection with electrochromic glass |
US8836263B2 (en) | 2004-05-06 | 2014-09-16 | Mechoshade Systems, Inc. | Automated shade control in connection with electrochromic glass |
US8525462B2 (en) | 2005-03-08 | 2013-09-03 | Mechoshade Systems, Inc. | Automated shade control method and system |
JP2009056495A (en) * | 2007-08-31 | 2009-03-19 | Koyo Giken:Kk | Spot welding electrode |
Also Published As
Publication number | Publication date |
---|---|
JP2579951B2 (en) | 1997-02-12 |
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