JPS6468948A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS6468948A
JPS6468948A JP22741087A JP22741087A JPS6468948A JP S6468948 A JPS6468948 A JP S6468948A JP 22741087 A JP22741087 A JP 22741087A JP 22741087 A JP22741087 A JP 22741087A JP S6468948 A JPS6468948 A JP S6468948A
Authority
JP
Japan
Prior art keywords
film
mask
semiconductor device
silicon
conductor part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP22741087A
Other languages
English (en)
Inventor
Takeshi Hasegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP22741087A priority Critical patent/JPS6468948A/ja
Publication of JPS6468948A publication Critical patent/JPS6468948A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Formation Of Insulating Films (AREA)
JP22741087A 1987-09-09 1987-09-09 Manufacture of semiconductor device Pending JPS6468948A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22741087A JPS6468948A (en) 1987-09-09 1987-09-09 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22741087A JPS6468948A (en) 1987-09-09 1987-09-09 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS6468948A true JPS6468948A (en) 1989-03-15

Family

ID=16860400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22741087A Pending JPS6468948A (en) 1987-09-09 1987-09-09 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6468948A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07176611A (ja) * 1993-09-15 1995-07-14 Hyundai Electron Ind Co Ltd 半導体装置の配線製造方法
JP2013048274A (ja) * 2006-01-13 2013-03-07 Internatl Business Mach Corp <Ibm> 低抵抗及び低インダクタンスの裏面貫通ビア及びその製造方法
CN104882369A (zh) * 2014-02-28 2015-09-02 株洲南车时代电气股份有限公司 碳化硅离子注入掺杂掩膜结构及其制备方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07176611A (ja) * 1993-09-15 1995-07-14 Hyundai Electron Ind Co Ltd 半導体装置の配線製造方法
JP2013048274A (ja) * 2006-01-13 2013-03-07 Internatl Business Mach Corp <Ibm> 低抵抗及び低インダクタンスの裏面貫通ビア及びその製造方法
CN104882369A (zh) * 2014-02-28 2015-09-02 株洲南车时代电气股份有限公司 碳化硅离子注入掺杂掩膜结构及其制备方法

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