JPS6467823A - Formation of oxide superconducting film - Google Patents

Formation of oxide superconducting film

Info

Publication number
JPS6467823A
JPS6467823A JP62223673A JP22367387A JPS6467823A JP S6467823 A JPS6467823 A JP S6467823A JP 62223673 A JP62223673 A JP 62223673A JP 22367387 A JP22367387 A JP 22367387A JP S6467823 A JPS6467823 A JP S6467823A
Authority
JP
Japan
Prior art keywords
crystals
oxide superconducting
formation
magnetic field
fine grains
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62223673A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0556281B2 (enrdf_load_html_response
Inventor
Shunpei Yamazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Semiconductor Energy Laboratory Co Ltd
Original Assignee
Semiconductor Energy Laboratory Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Semiconductor Energy Laboratory Co Ltd filed Critical Semiconductor Energy Laboratory Co Ltd
Priority to JP62223673A priority Critical patent/JPS6467823A/ja
Publication of JPS6467823A publication Critical patent/JPS6467823A/ja
Publication of JPH0556281B2 publication Critical patent/JPH0556281B2/ja
Granted legal-status Critical Current

Links

Classifications

    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E40/00—Technologies for an efficient electrical power generation, transmission or distribution
    • Y02E40/60—Superconducting electric elements or equipment; Power systems integrating superconducting elements or equipment

Landscapes

  • Oxygen, Ozone, And Oxides In General (AREA)
  • Inorganic Compounds Of Heavy Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Superconductors And Manufacturing Methods Therefor (AREA)
JP62223673A 1987-09-07 1987-09-07 Formation of oxide superconducting film Granted JPS6467823A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62223673A JPS6467823A (en) 1987-09-07 1987-09-07 Formation of oxide superconducting film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62223673A JPS6467823A (en) 1987-09-07 1987-09-07 Formation of oxide superconducting film

Publications (2)

Publication Number Publication Date
JPS6467823A true JPS6467823A (en) 1989-03-14
JPH0556281B2 JPH0556281B2 (enrdf_load_html_response) 1993-08-19

Family

ID=16801853

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62223673A Granted JPS6467823A (en) 1987-09-07 1987-09-07 Formation of oxide superconducting film

Country Status (1)

Country Link
JP (1) JPS6467823A (enrdf_load_html_response)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0288408A (ja) * 1988-05-31 1990-03-28 Mitsubishi Metal Corp 超電導セラミックス膜の製造法
US5128786A (en) * 1989-07-14 1992-07-07 Casio Computer Co., Ltd. Liquid crystal display device having light shielding member with discontinous pattern

Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56109824A (en) * 1980-02-05 1981-08-31 Nippon Telegr & Teleph Corp <Ntt> Manufacture of oxide superconductive thin film
JPS5963732A (ja) * 1982-10-04 1984-04-11 Hitachi Ltd 薄膜形成装置
JPS59219461A (ja) * 1983-05-24 1984-12-10 Toshiba Corp アモルフアスシリコン成膜装置
JPS60117711A (ja) * 1983-11-30 1985-06-25 Toshiba Corp 薄膜形成装置
JPS61109036A (ja) * 1984-11-01 1986-05-27 Canon Inc テレビレンズの表示装置
JPS61125133A (ja) * 1984-11-22 1986-06-12 Hitachi Ltd 低温プラズマ電磁界制御機構
JPS61267324A (ja) * 1985-05-21 1986-11-26 Fuji Electric Co Ltd 乾式薄膜加工装置
JPS62150726A (ja) * 1985-12-24 1987-07-04 Fuji Electric Co Ltd 半導体装置の製造方法

Patent Citations (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56109824A (en) * 1980-02-05 1981-08-31 Nippon Telegr & Teleph Corp <Ntt> Manufacture of oxide superconductive thin film
JPS5963732A (ja) * 1982-10-04 1984-04-11 Hitachi Ltd 薄膜形成装置
JPS59219461A (ja) * 1983-05-24 1984-12-10 Toshiba Corp アモルフアスシリコン成膜装置
JPS60117711A (ja) * 1983-11-30 1985-06-25 Toshiba Corp 薄膜形成装置
JPS61109036A (ja) * 1984-11-01 1986-05-27 Canon Inc テレビレンズの表示装置
JPS61125133A (ja) * 1984-11-22 1986-06-12 Hitachi Ltd 低温プラズマ電磁界制御機構
JPS61267324A (ja) * 1985-05-21 1986-11-26 Fuji Electric Co Ltd 乾式薄膜加工装置
JPS62150726A (ja) * 1985-12-24 1987-07-04 Fuji Electric Co Ltd 半導体装置の製造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0288408A (ja) * 1988-05-31 1990-03-28 Mitsubishi Metal Corp 超電導セラミックス膜の製造法
US5128786A (en) * 1989-07-14 1992-07-07 Casio Computer Co., Ltd. Liquid crystal display device having light shielding member with discontinous pattern

Also Published As

Publication number Publication date
JPH0556281B2 (enrdf_load_html_response) 1993-08-19

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