JPS64657B2 - - Google Patents
Info
- Publication number
- JPS64657B2 JPS64657B2 JP13388381A JP13388381A JPS64657B2 JP S64657 B2 JPS64657 B2 JP S64657B2 JP 13388381 A JP13388381 A JP 13388381A JP 13388381 A JP13388381 A JP 13388381A JP S64657 B2 JPS64657 B2 JP S64657B2
- Authority
- JP
- Japan
- Prior art keywords
- inspected
- scanning
- light
- drive
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000007547 defect Effects 0.000 claims description 10
- 238000007689 inspection Methods 0.000 claims description 10
- 230000001678 irradiating effect Effects 0.000 claims description 2
- 230000003287 optical effect Effects 0.000 description 11
- 238000010586 diagram Methods 0.000 description 10
- 238000007796 conventional method Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
- G01N21/88—Investigating the presence of flaws or contamination
- G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
- G01N21/952—Inspecting the exterior surface of cylindrical bodies or wires
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13388381A JPS5834346A (ja) | 1981-08-26 | 1981-08-26 | 表面欠陥検査装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13388381A JPS5834346A (ja) | 1981-08-26 | 1981-08-26 | 表面欠陥検査装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5834346A JPS5834346A (ja) | 1983-02-28 |
JPS64657B2 true JPS64657B2 (it) | 1989-01-09 |
Family
ID=15115313
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13388381A Granted JPS5834346A (ja) | 1981-08-26 | 1981-08-26 | 表面欠陥検査装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5834346A (it) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03125838U (it) * | 1990-03-31 | 1991-12-19 |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02152681A (ja) * | 1988-11-25 | 1990-06-12 | Tanaka Kikinzoku Kogyo Kk | 刷子接点の梱包ケース |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5327087A (en) * | 1976-08-26 | 1978-03-13 | Toshiba Corp | Flaw detector |
-
1981
- 1981-08-26 JP JP13388381A patent/JPS5834346A/ja active Granted
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03125838U (it) * | 1990-03-31 | 1991-12-19 |
Also Published As
Publication number | Publication date |
---|---|
JPS5834346A (ja) | 1983-02-28 |
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