JPS6465256A - Film forming device - Google Patents
Film forming deviceInfo
- Publication number
- JPS6465256A JPS6465256A JP22214287A JP22214287A JPS6465256A JP S6465256 A JPS6465256 A JP S6465256A JP 22214287 A JP22214287 A JP 22214287A JP 22214287 A JP22214287 A JP 22214287A JP S6465256 A JPS6465256 A JP S6465256A
- Authority
- JP
- Japan
- Prior art keywords
- film forming
- vacuum
- degree
- film
- vacuum vessel
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To control the degree of vacuum in a film forming vacuum vessel with high accuracy so that film formation is uniformized by calibrating a vacuum degree measuring means to be used at the time of film formation in accordance with the measured value of the other vacuum degree measuring means which prevents the inflow of a film forming material. CONSTITUTION:Voltage is applied by a power supply E to a target 5 in the film forming vacuum vessel 8 to generate fine particles which are brought into reaction with the gas supplied from a cylinder 10 so that the film of the resultant reaction product is stuck and formed on a substrate 1. The inside of the film forming vacuum vessel 8 of the above-mentioned film forming device is evacuated by a rotary pump 19 and a main cryostatic pump 6 to the prescribed degree of vacuum. The working gas is then introduced into the vacuum vessel from the cylinder 10 and the degree of vacuum is measured by a diaphragm type pressure gage 35, following which an ion gage 2 is calibrated. After the inflow of the film forming material is prevented by closing a solenoid valve 33, the film forming operation is carried out in accordance with the measured value of the above-mentioned ion gage 2.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62222142A JP2633575B2 (en) | 1987-09-07 | 1987-09-07 | Film forming equipment |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62222142A JP2633575B2 (en) | 1987-09-07 | 1987-09-07 | Film forming equipment |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6465256A true JPS6465256A (en) | 1989-03-10 |
JP2633575B2 JP2633575B2 (en) | 1997-07-23 |
Family
ID=16777834
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62222142A Expired - Fee Related JP2633575B2 (en) | 1987-09-07 | 1987-09-07 | Film forming equipment |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2633575B2 (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58128978U (en) * | 1982-02-24 | 1983-09-01 | 株式会社日立製作所 | vacuum equipment |
-
1987
- 1987-09-07 JP JP62222142A patent/JP2633575B2/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58128978U (en) * | 1982-02-24 | 1983-09-01 | 株式会社日立製作所 | vacuum equipment |
Also Published As
Publication number | Publication date |
---|---|
JP2633575B2 (en) | 1997-07-23 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |