JPS6465256A - Film forming device - Google Patents

Film forming device

Info

Publication number
JPS6465256A
JPS6465256A JP22214287A JP22214287A JPS6465256A JP S6465256 A JPS6465256 A JP S6465256A JP 22214287 A JP22214287 A JP 22214287A JP 22214287 A JP22214287 A JP 22214287A JP S6465256 A JPS6465256 A JP S6465256A
Authority
JP
Japan
Prior art keywords
film forming
vacuum
degree
film
vacuum vessel
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP22214287A
Other languages
Japanese (ja)
Other versions
JP2633575B2 (en
Inventor
Hiroyuki Tono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Toshiba Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Corp filed Critical Toshiba Corp
Priority to JP62222142A priority Critical patent/JP2633575B2/en
Publication of JPS6465256A publication Critical patent/JPS6465256A/en
Application granted granted Critical
Publication of JP2633575B2 publication Critical patent/JP2633575B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Abstract

PURPOSE:To control the degree of vacuum in a film forming vacuum vessel with high accuracy so that film formation is uniformized by calibrating a vacuum degree measuring means to be used at the time of film formation in accordance with the measured value of the other vacuum degree measuring means which prevents the inflow of a film forming material. CONSTITUTION:Voltage is applied by a power supply E to a target 5 in the film forming vacuum vessel 8 to generate fine particles which are brought into reaction with the gas supplied from a cylinder 10 so that the film of the resultant reaction product is stuck and formed on a substrate 1. The inside of the film forming vacuum vessel 8 of the above-mentioned film forming device is evacuated by a rotary pump 19 and a main cryostatic pump 6 to the prescribed degree of vacuum. The working gas is then introduced into the vacuum vessel from the cylinder 10 and the degree of vacuum is measured by a diaphragm type pressure gage 35, following which an ion gage 2 is calibrated. After the inflow of the film forming material is prevented by closing a solenoid valve 33, the film forming operation is carried out in accordance with the measured value of the above-mentioned ion gage 2.
JP62222142A 1987-09-07 1987-09-07 Film forming equipment Expired - Fee Related JP2633575B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62222142A JP2633575B2 (en) 1987-09-07 1987-09-07 Film forming equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62222142A JP2633575B2 (en) 1987-09-07 1987-09-07 Film forming equipment

Publications (2)

Publication Number Publication Date
JPS6465256A true JPS6465256A (en) 1989-03-10
JP2633575B2 JP2633575B2 (en) 1997-07-23

Family

ID=16777834

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62222142A Expired - Fee Related JP2633575B2 (en) 1987-09-07 1987-09-07 Film forming equipment

Country Status (1)

Country Link
JP (1) JP2633575B2 (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58128978U (en) * 1982-02-24 1983-09-01 株式会社日立製作所 vacuum equipment

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58128978U (en) * 1982-02-24 1983-09-01 株式会社日立製作所 vacuum equipment

Also Published As

Publication number Publication date
JP2633575B2 (en) 1997-07-23

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees