JPS5767165A - Method and device for production of ultrafine particle film - Google Patents

Method and device for production of ultrafine particle film

Info

Publication number
JPS5767165A
JPS5767165A JP55141219A JP14121980A JPS5767165A JP S5767165 A JPS5767165 A JP S5767165A JP 55141219 A JP55141219 A JP 55141219A JP 14121980 A JP14121980 A JP 14121980A JP S5767165 A JPS5767165 A JP S5767165A
Authority
JP
Japan
Prior art keywords
ultrafine particle
valve
atmosphere
boat
high frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP55141219A
Other languages
Japanese (ja)
Other versions
JPS5929107B2 (en
Inventor
Atsushi Abe
Kuni Ogawa
Masahiro Nishikawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP55141219A priority Critical patent/JPS5929107B2/en
Priority to US06/309,088 priority patent/US4395440A/en
Publication of JPS5767165A publication Critical patent/JPS5767165A/en
Publication of JPS5929107B2 publication Critical patent/JPS5929107B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation

Abstract

PURPOSE:To improve the reproducibility and uniformity of ultrafine particle films and perform production effectively and efficiently by winding a high frequency coil exciting a gaseous atmosphere which moves an evaporating material on a cylindrical body. CONSTITUTION:In the case of producing a film of, for example, a silver oxide, with a producing device for ultrafine particle films of oxides, nitrides, carbides, etc., the inside of a vacuum vessel consisting of a bottom face plate 1 and a bell-jar 2 is evacuated through a valve 10, thence the valve 10 is closed. Next, gaseous O2 is maintained at constant pressure via a lead-in valve 8. Electric power is applied from an electric power source 20 to a high frequency coil 17 wound on a cylindrical body 16, by which the O2 in the cylinder 16 is excited and activated. On stabilizing of oxygen plasma, electricity is conducted to a boat 5 to allow the boat to evolve heat by holding a through-hole 14 closed with a shutter 13, by which thin is evaporated. When the evaporation stabilizes, the hole 14 is opened, and tin vapor is put into the oxygen plasma atmosphere of the cylinder 16 to form an ultrafine particle film of a tin oxide on a substrate 12. Thereby, the tin vapor is introduced uniformly into said atmosphere.
JP55141219A 1980-10-09 1980-10-09 Ultrafine particle membrane manufacturing method and manufacturing device Expired JPS5929107B2 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP55141219A JPS5929107B2 (en) 1980-10-09 1980-10-09 Ultrafine particle membrane manufacturing method and manufacturing device
US06/309,088 US4395440A (en) 1980-10-09 1981-10-06 Method of and apparatus for manufacturing ultrafine particle film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP55141219A JPS5929107B2 (en) 1980-10-09 1980-10-09 Ultrafine particle membrane manufacturing method and manufacturing device

Publications (2)

Publication Number Publication Date
JPS5767165A true JPS5767165A (en) 1982-04-23
JPS5929107B2 JPS5929107B2 (en) 1984-07-18

Family

ID=15286894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP55141219A Expired JPS5929107B2 (en) 1980-10-09 1980-10-09 Ultrafine particle membrane manufacturing method and manufacturing device

Country Status (1)

Country Link
JP (1) JPS5929107B2 (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5942107U (en) * 1982-09-09 1984-03-19 株式会社神崎高級工機製作所 Control device for agricultural hydraulic lift equipment
JPH01148107A (en) * 1987-12-04 1989-06-09 Kubota Ltd Hydraulic control device of tractor

Also Published As

Publication number Publication date
JPS5929107B2 (en) 1984-07-18

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