JPS58128978U

JPS58128978U - vacuum equipment

Info

Publication number: JPS58128978U
Application number: JP2413282U
Authority: JP
Inventors: 大蔵　昭光; 宮内　恭一; 明珍　英次
Original assignee: 株式会社日立製作所
Priority date: 1982-02-24
Filing date: 1982-02-24
Publication date: 1983-09-01

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

[Brief explanation of drawings]

第１図は本考案の一実施例をマイクロ波プラズマエツ≠
ング装置に適用した場合について示した構成概略図、第
２図、第３図は他の一実施例について示した構成概略図
である。４・・・試料、１１・・・エツチング室、試料室）、１
２・・・真空排気ポンプ、１３ａ、１３ｂ・・・測定子
取付ポート、１４ａ、１４ｂ・・・測定子、１５・・・
開閉バルブ、１６ａ、　　１６ｂ−・・真空計、１Ｂ、
１８ａ。１８ｂ・・・予備室、１９・・・測定制御装置、１５ａ
。１５ｂ・・・開閉バルブ、２０ａ、２０ｂ・・・開閉バ
ルブ、２１・・・予備排気装置、１７・・・真空計。Figure 1 shows an example of the present invention using microwave plasma.
FIGS. 2 and 3 are schematic diagrams showing the construction of another embodiment. 4...sample, 11...etching chamber, sample chamber), 1
2... Vacuum exhaust pump, 13a, 13b... Gauge head attachment port, 14a, 14b... Gauge head, 15...
Open/close valve, 16a, 16b--vacuum gauge, 1B,
18a. 18b...Preliminary room, 19...Measurement control device, 15a
. 15b... Opening/closing valve, 20a, 20b... Opening/closing valve, 21... Preliminary exhaust device, 17... Vacuum gauge.

Claims

[Scope of Claim for Utility Model Registration] 1. A vacuum device that processes or analyzes a sample by introducing gas, including a plurality of preliminary chambers that are in vacuum communication with a sample chamber and to which vacuum gauge probes can be attached, and the preliminary chambers. A vacuum apparatus characterized in that at least one of the chambers is equipped with a means for vacuum-isolating the sample chamber. 2. The preliminary chamber is equipped with an evacuation means that can perform preliminary evacuation independently of the sample chamber, and also includes a means for controlling the evacuation operation between the sample chamber and the preliminary chamber, and a vacuum gauge provided in the preliminary chamber. 2. The vacuum device according to claim 1, further comprising means for controlling the operation. 3. The vacuum gauge is constructed of a hot cathode type ionization vacuum type, and has a means for automatically switching to another filament when the measuring probe in use is broken or deteriorated, and a means for automatically switching to another filament, and a means for connecting the sample chamber and the preliminary chamber. 2. The vacuum apparatus according to claim 1, further comprising means for controlling vacuum cutoff.