JPS6463956A - Pattern forming method - Google Patents
Pattern forming methodInfo
- Publication number
- JPS6463956A JPS6463956A JP22022287A JP22022287A JPS6463956A JP S6463956 A JPS6463956 A JP S6463956A JP 22022287 A JP22022287 A JP 22022287A JP 22022287 A JP22022287 A JP 22022287A JP S6463956 A JPS6463956 A JP S6463956A
- Authority
- JP
- Japan
- Prior art keywords
- film
- pattern
- photoresist film
- insolubilized
- resist
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/26—Processing photosensitive materials; Apparatus therefor
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Photosensitive Polymer And Photoresist Processing (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22022287A JPS6463956A (en) | 1987-09-04 | 1987-09-04 | Pattern forming method |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP22022287A JPS6463956A (en) | 1987-09-04 | 1987-09-04 | Pattern forming method |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6463956A true JPS6463956A (en) | 1989-03-09 |
Family
ID=16747791
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP22022287A Pending JPS6463956A (en) | 1987-09-04 | 1987-09-04 | Pattern forming method |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6463956A (ja) |
-
1987
- 1987-09-04 JP JP22022287A patent/JPS6463956A/ja active Pending
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