JPS645884Y2 - - Google Patents

Info

Publication number
JPS645884Y2
JPS645884Y2 JP1984177260U JP17726084U JPS645884Y2 JP S645884 Y2 JPS645884 Y2 JP S645884Y2 JP 1984177260 U JP1984177260 U JP 1984177260U JP 17726084 U JP17726084 U JP 17726084U JP S645884 Y2 JPS645884 Y2 JP S645884Y2
Authority
JP
Japan
Prior art keywords
tank
semiconductor material
processing liquid
processing
table surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1984177260U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6192053U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1984177260U priority Critical patent/JPS645884Y2/ja
Publication of JPS6192053U publication Critical patent/JPS6192053U/ja
Application granted granted Critical
Publication of JPS645884Y2 publication Critical patent/JPS645884Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Weting (AREA)
JP1984177260U 1984-11-21 1984-11-21 Expired JPS645884Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1984177260U JPS645884Y2 (OSRAM) 1984-11-21 1984-11-21

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1984177260U JPS645884Y2 (OSRAM) 1984-11-21 1984-11-21

Publications (2)

Publication Number Publication Date
JPS6192053U JPS6192053U (OSRAM) 1986-06-14
JPS645884Y2 true JPS645884Y2 (OSRAM) 1989-02-14

Family

ID=30734831

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1984177260U Expired JPS645884Y2 (OSRAM) 1984-11-21 1984-11-21

Country Status (1)

Country Link
JP (1) JPS645884Y2 (OSRAM)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4118303A (en) * 1976-08-30 1978-10-03 Burroughs Corporation Apparatus for chemically treating a single side of a workpiece
JPS57110674A (en) * 1980-12-29 1982-07-09 Fujitsu Ltd Surface treating device
JPS58210170A (ja) * 1982-06-01 1983-12-07 Seiichiro Sogo 金属薄膜または酸化膜のエツチング装置

Also Published As

Publication number Publication date
JPS6192053U (OSRAM) 1986-06-14

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