JPS645878Y2 - - Google Patents
Info
- Publication number
- JPS645878Y2 JPS645878Y2 JP5950683U JP5950683U JPS645878Y2 JP S645878 Y2 JPS645878 Y2 JP S645878Y2 JP 5950683 U JP5950683 U JP 5950683U JP 5950683 U JP5950683 U JP 5950683U JP S645878 Y2 JPS645878 Y2 JP S645878Y2
- Authority
- JP
- Japan
- Prior art keywords
- flash discharge
- discharge lamp
- parallel
- bundle
- wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 229910000831 Steel Inorganic materials 0.000 claims description 2
- 239000010959 steel Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 description 10
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 6
- 239000004020 conductor Substances 0.000 description 5
- 238000000137 annealing Methods 0.000 description 3
- 229910052742 iron Inorganic materials 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000010438 heat treatment Methods 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 229910001873 dinitrogen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Discharge-Lamp Control Circuits And Pulse- Feed Circuits (AREA)
- Furnace Details (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5950683U JPS59166442U (ja) | 1983-04-22 | 1983-04-22 | 光照射装置のランプ結線構造 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5950683U JPS59166442U (ja) | 1983-04-22 | 1983-04-22 | 光照射装置のランプ結線構造 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59166442U JPS59166442U (ja) | 1984-11-08 |
| JPS645878Y2 true JPS645878Y2 (https=) | 1989-02-14 |
Family
ID=30189754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5950683U Granted JPS59166442U (ja) | 1983-04-22 | 1983-04-22 | 光照射装置のランプ結線構造 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59166442U (https=) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2010247576A (ja) * | 2009-04-13 | 2010-11-04 | Nec Lighting Ltd | 閃光灯システム及びその配線方法 |
| JP2012068002A (ja) * | 2010-09-27 | 2012-04-05 | Ulvac-Riko Inc | 加熱装置 |
-
1983
- 1983-04-22 JP JP5950683U patent/JPS59166442U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59166442U (ja) | 1984-11-08 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8143557B2 (en) | Plane heater | |
| DE69528961D1 (de) | Verfahren zur Herstellung von intergrierten Schaltungen mit Hochspannungs- und Niederspannungs-lateralen-DMOS-Leistungsbauelementen und nichtflüchtigen Speicherzellen | |
| JPS645878Y2 (https=) | ||
| KR950000310B1 (ko) | 플라즈마 cvd장치 | |
| JP2950728B2 (ja) | Ｂｔ処理装置及びｂｔ処理方法 | |
| KR930702157A (ko) | 형광 프린터용 광원 | |
| KR100417438B1 (ko) | 플랫 라디에이터 | |
| KR0155950B1 (ko) | 플라즈마 확산 제어 방법 및 그 장치 | |
| KR100599461B1 (ko) | 대기압 플라즈마 발생장치 및 이를 이용한 플라즈마프로세스 시스템 | |
| US7221080B2 (en) | Field emission display including a metal grid | |
| JPS6226572B2 (https=) | ||
| KR20060047351A (ko) | 플래시 램프 조사 장치 | |
| CN101764020B (zh) | 离子管 | |
| JP2002231488A (ja) | ランプ装置 | |
| CN217588851U (zh) | 用于igbt模块信号端子的固定工装 | |
| KR102221523B1 (ko) | 유도가열 방식의 용접 장치 | |
| CN1661130A (zh) | 等离子处理设备、半导体制造设备以及其中使用的静电夹具单元 | |
| RU2055412C1 (ru) | Способ изготовления блока арматуры газоразрядной индикаторной панели | |
| JPH1154757A (ja) | 薄膜トランジスタの製造方法並びに製造装置 | |
| KR200185292Y1 (ko) | 고전류형 이온주입장치의 서프레션 피드스루우 | |
| KR100731623B1 (ko) | 편향코일의 클립장치 | |
| KR100260258B1 (ko) | 필드 에미터 소자의 제조방법 | |
| JPH062196Y2 (ja) | 蛍光表示管 | |
| JPH065218A (ja) | イオン源装置 | |
| KR20030090150A (ko) | 전자빔 증발기에서의 이차전자 제거장치 |