JPS6457695A - Hybrid integrated circuit - Google Patents
Hybrid integrated circuitInfo
- Publication number
- JPS6457695A JPS6457695A JP21424387A JP21424387A JPS6457695A JP S6457695 A JPS6457695 A JP S6457695A JP 21424387 A JP21424387 A JP 21424387A JP 21424387 A JP21424387 A JP 21424387A JP S6457695 A JPS6457695 A JP S6457695A
- Authority
- JP
- Japan
- Prior art keywords
- film
- conductor
- resistor
- thin film
- apertures
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Parts Printed On Printed Circuit Boards (AREA)
Abstract
PURPOSE:To form a thin film resistance circuit having the cross part of circuits oh one sheet of a substrate and to obtain a hybrid integrated circuit mounted with various components by a method wherein a first thin film conductor film is formed on the insulating substrate, an interlayer insulating film having apertures is formed thereon, a second thin film conductor film having apertures are formed thereon and the like. CONSTITUTION:A first thin film conductor film 3 formed on an insulating ceramic substrate 1, an interlayer insulating film 5, which is formed on the film 3 and has apertures 6 to reach the film 3, a second thin film conductor film 8, which is formed on the film 5 and is connected to the film 3 through the above apertures 6, and a thin film resistor film 4 formed on the above substrate 1 are provided. For example, a Ta2N resistor film 2 and the Au conductor film 3 are continuously formed on the alumina ceramic substrate 1 to form a resistor circuit. Then, the photosensitive polyimide film 5 is coated and the conductor through holes 6 for interlayer connection and a resistor trimming hole 7 are formed and cured. Then, after the second layer conductor circuit 8 is formed, the resistor pattern 4 is cut by a laser trimming method to adjust a resistivity.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21424387A JPS6457695A (en) | 1987-08-27 | 1987-08-27 | Hybrid integrated circuit |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP21424387A JPS6457695A (en) | 1987-08-27 | 1987-08-27 | Hybrid integrated circuit |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6457695A true JPS6457695A (en) | 1989-03-03 |
Family
ID=16652549
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP21424387A Pending JPS6457695A (en) | 1987-08-27 | 1987-08-27 | Hybrid integrated circuit |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6457695A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1053507A1 (en) * | 1998-07-07 | 2000-11-22 | Motorola, Inc. | Integral thin-film metal resistor with improved tolerance and simplified processing |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5164882A (en) * | 1974-12-03 | 1976-06-04 | Nippon Electric Co | HANDOTAISHUSEKIKAIROYOTA SOHAISENKIBAN |
JPS5398096A (en) * | 1977-02-08 | 1978-08-26 | Nec Corp | Production of thin film metal resistor |
JPS53141459A (en) * | 1977-05-17 | 1978-12-09 | Asahi Chemical Ind | Printed circuit board with thin film resistor |
JPS6285496A (en) * | 1985-10-09 | 1987-04-18 | 三菱電機株式会社 | Manufacture of printed circuit board |
-
1987
- 1987-08-27 JP JP21424387A patent/JPS6457695A/en active Pending
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5164882A (en) * | 1974-12-03 | 1976-06-04 | Nippon Electric Co | HANDOTAISHUSEKIKAIROYOTA SOHAISENKIBAN |
JPS5398096A (en) * | 1977-02-08 | 1978-08-26 | Nec Corp | Production of thin film metal resistor |
JPS53141459A (en) * | 1977-05-17 | 1978-12-09 | Asahi Chemical Ind | Printed circuit board with thin film resistor |
JPS6285496A (en) * | 1985-10-09 | 1987-04-18 | 三菱電機株式会社 | Manufacture of printed circuit board |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1053507A1 (en) * | 1998-07-07 | 2000-11-22 | Motorola, Inc. | Integral thin-film metal resistor with improved tolerance and simplified processing |
EP1053507A4 (en) * | 1998-07-07 | 2002-07-24 | Motorola Inc | Integral thin-film metal resistor with improved tolerance and simplified processing |
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