JPS6457695A - Hybrid integrated circuit - Google Patents

Hybrid integrated circuit

Info

Publication number
JPS6457695A
JPS6457695A JP21424387A JP21424387A JPS6457695A JP S6457695 A JPS6457695 A JP S6457695A JP 21424387 A JP21424387 A JP 21424387A JP 21424387 A JP21424387 A JP 21424387A JP S6457695 A JPS6457695 A JP S6457695A
Authority
JP
Japan
Prior art keywords
film
conductor
resistor
thin film
apertures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21424387A
Other languages
Japanese (ja)
Inventor
Nobuo Fukuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP21424387A priority Critical patent/JPS6457695A/en
Publication of JPS6457695A publication Critical patent/JPS6457695A/en
Pending legal-status Critical Current

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  • Parts Printed On Printed Circuit Boards (AREA)

Abstract

PURPOSE:To form a thin film resistance circuit having the cross part of circuits oh one sheet of a substrate and to obtain a hybrid integrated circuit mounted with various components by a method wherein a first thin film conductor film is formed on the insulating substrate, an interlayer insulating film having apertures is formed thereon, a second thin film conductor film having apertures are formed thereon and the like. CONSTITUTION:A first thin film conductor film 3 formed on an insulating ceramic substrate 1, an interlayer insulating film 5, which is formed on the film 3 and has apertures 6 to reach the film 3, a second thin film conductor film 8, which is formed on the film 5 and is connected to the film 3 through the above apertures 6, and a thin film resistor film 4 formed on the above substrate 1 are provided. For example, a Ta2N resistor film 2 and the Au conductor film 3 are continuously formed on the alumina ceramic substrate 1 to form a resistor circuit. Then, the photosensitive polyimide film 5 is coated and the conductor through holes 6 for interlayer connection and a resistor trimming hole 7 are formed and cured. Then, after the second layer conductor circuit 8 is formed, the resistor pattern 4 is cut by a laser trimming method to adjust a resistivity.
JP21424387A 1987-08-27 1987-08-27 Hybrid integrated circuit Pending JPS6457695A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21424387A JPS6457695A (en) 1987-08-27 1987-08-27 Hybrid integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21424387A JPS6457695A (en) 1987-08-27 1987-08-27 Hybrid integrated circuit

Publications (1)

Publication Number Publication Date
JPS6457695A true JPS6457695A (en) 1989-03-03

Family

ID=16652549

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21424387A Pending JPS6457695A (en) 1987-08-27 1987-08-27 Hybrid integrated circuit

Country Status (1)

Country Link
JP (1) JPS6457695A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1053507A1 (en) * 1998-07-07 2000-11-22 Motorola, Inc. Integral thin-film metal resistor with improved tolerance and simplified processing

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5164882A (en) * 1974-12-03 1976-06-04 Nippon Electric Co HANDOTAISHUSEKIKAIROYOTA SOHAISENKIBAN
JPS5398096A (en) * 1977-02-08 1978-08-26 Nec Corp Production of thin film metal resistor
JPS53141459A (en) * 1977-05-17 1978-12-09 Asahi Chemical Ind Printed circuit board with thin film resistor
JPS6285496A (en) * 1985-10-09 1987-04-18 三菱電機株式会社 Manufacture of printed circuit board

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5164882A (en) * 1974-12-03 1976-06-04 Nippon Electric Co HANDOTAISHUSEKIKAIROYOTA SOHAISENKIBAN
JPS5398096A (en) * 1977-02-08 1978-08-26 Nec Corp Production of thin film metal resistor
JPS53141459A (en) * 1977-05-17 1978-12-09 Asahi Chemical Ind Printed circuit board with thin film resistor
JPS6285496A (en) * 1985-10-09 1987-04-18 三菱電機株式会社 Manufacture of printed circuit board

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1053507A1 (en) * 1998-07-07 2000-11-22 Motorola, Inc. Integral thin-film metal resistor with improved tolerance and simplified processing
EP1053507A4 (en) * 1998-07-07 2002-07-24 Motorola Inc Integral thin-film metal resistor with improved tolerance and simplified processing

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