JPS6457634A - Detection of multilayer patter defect and device therefor - Google Patents
Detection of multilayer patter defect and device thereforInfo
- Publication number
- JPS6457634A JPS6457634A JP21273087A JP21273087A JPS6457634A JP S6457634 A JPS6457634 A JP S6457634A JP 21273087 A JP21273087 A JP 21273087A JP 21273087 A JP21273087 A JP 21273087A JP S6457634 A JPS6457634 A JP S6457634A
- Authority
- JP
- Japan
- Prior art keywords
- image
- detected
- pattern
- threshold value
- multilayer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Abstract
PURPOSE:To avoid the error mistaking a grain for a defect, and make it possible to precisely detect defects even if local change of film thickness exists in a wiring pattern, by forming a threshold value image, and constituting a binary-valued difference image between a detected image and a reference image by said threshold value image. CONSTITUTION:For a multilayer pattern, a threshold value image is formed wherein threshold values Vth1, Vth2 and Vthe are set. For a region surrounded by a pattern edge 53, Vth1 and Vth2 are obtained by the highest brightness of grains 50 in a domain for the respective regions. For the pattern edge 53, Vthe is obtained by the brightness of the edge part 53. A difference image between a detected image obtained by sensing the multilayer pattern with an image sensing device, and a reference image is detected. By constituting a binary-valued image for the difference image by applying the above- mentioned threshold value image, defects existing in the multilayer pattern are detected. Defects existing in the region surrounded by the pattern edge can be detected in the manner in which only ones larger than the grain are discriminated. The form defect on the pattern edge can be detected without overlook, even if it is minute.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21273087A JPH0774787B2 (en) | 1987-08-28 | 1987-08-28 | Multi-layer pattern defect detection method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21273087A JPH0774787B2 (en) | 1987-08-28 | 1987-08-28 | Multi-layer pattern defect detection method and apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6457634A true JPS6457634A (en) | 1989-03-03 |
| JPH0774787B2 JPH0774787B2 (en) | 1995-08-09 |
Family
ID=16627482
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21273087A Expired - Fee Related JPH0774787B2 (en) | 1987-08-28 | 1987-08-28 | Multi-layer pattern defect detection method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0774787B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2361816A2 (en) | 2010-02-26 | 2011-08-31 | Fujikiko Co., Ltd. | Steering column device |
| JP2012251935A (en) * | 2011-06-06 | 2012-12-20 | Fujitsu Semiconductor Ltd | Inspection device and inspection method |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP4699873B2 (en) * | 2005-11-10 | 2011-06-15 | 株式会社日立ハイテクノロジーズ | Defect data processing and review equipment |
-
1987
- 1987-08-28 JP JP21273087A patent/JPH0774787B2/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP2361816A2 (en) | 2010-02-26 | 2011-08-31 | Fujikiko Co., Ltd. | Steering column device |
| JP2012251935A (en) * | 2011-06-06 | 2012-12-20 | Fujitsu Semiconductor Ltd | Inspection device and inspection method |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0774787B2 (en) | 1995-08-09 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |