JPS6455513A - Automatic focusing device for microscope - Google Patents

Automatic focusing device for microscope

Info

Publication number
JPS6455513A
JPS6455513A JP21156787A JP21156787A JPS6455513A JP S6455513 A JPS6455513 A JP S6455513A JP 21156787 A JP21156787 A JP 21156787A JP 21156787 A JP21156787 A JP 21156787A JP S6455513 A JPS6455513 A JP S6455513A
Authority
JP
Japan
Prior art keywords
microscope
light receiving
lens
detecting
receiving surfaces
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP21156787A
Other languages
Japanese (ja)
Inventor
Naoya Hoshino
Atsushi Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP21156787A priority Critical patent/JPS6455513A/en
Publication of JPS6455513A publication Critical patent/JPS6455513A/en
Pending legal-status Critical Current

Links

Landscapes

  • Automatic Focus Adjustment (AREA)
  • Microscoopes, Condenser (AREA)

Abstract

PURPOSE:To speedily adjust the focus of a microscope by leading laser beams reflected by an object to be inspected to an astigmatism means through an objective lens and a dichroic mirror, detecting them by means of a four-divided photodiode, thereby controlling a driving means. CONSTITUTION:Laser beams to which a cylindrical lens 10 gives astigmatism produce a minimum blur circle l0 between focal lines l1 and l2, which satisfy a relation of l1rt. anglel2. The light receiving surfaces of the four-divided diode are the same in area and shape, and detecting signals can be taken out of each light receiving surface individually. Said diode is arranged such that each light receiving surface is perpendicular to a lens 10 and the optical axis of a detecting lens 11 and is aligned with the circle l0 if the microscope 101 is focused, and the focal lines l1 and l2 are not in parallel with four division lines. The signals issued by the light receiving surfaces 12a-12d are operated and process to drive a pulse motor and shift a microscope movable part. Then the outputs from the light receiving surfaces are made equal. With this constitution, the focus adjustment of the microscope can be completed speedily.
JP21156787A 1987-08-26 1987-08-26 Automatic focusing device for microscope Pending JPS6455513A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21156787A JPS6455513A (en) 1987-08-26 1987-08-26 Automatic focusing device for microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21156787A JPS6455513A (en) 1987-08-26 1987-08-26 Automatic focusing device for microscope

Publications (1)

Publication Number Publication Date
JPS6455513A true JPS6455513A (en) 1989-03-02

Family

ID=16607922

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21156787A Pending JPS6455513A (en) 1987-08-26 1987-08-26 Automatic focusing device for microscope

Country Status (1)

Country Link
JP (1) JPS6455513A (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19651667A1 (en) * 1996-12-12 1997-09-11 Rudolf Dr Ing Groskopf Test system for three dimensional testing of object
DE19648316C1 (en) * 1996-11-21 1998-04-09 Rudolf Dr Ing Groskopf Three=dimensional object examination equipment
KR20010045975A (en) * 1999-11-09 2001-06-05 조성환 a microscope a picture dealer an item change equipment
JP2006293222A (en) * 2005-04-14 2006-10-26 Olympus Corp Focus-detecting device
JP2008146060A (en) * 2006-12-12 2008-06-26 Instrument Technology Research Center National Applied Research Lab Automatic focus device and method thereof

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19648316C1 (en) * 1996-11-21 1998-04-09 Rudolf Dr Ing Groskopf Three=dimensional object examination equipment
DE19651667A1 (en) * 1996-12-12 1997-09-11 Rudolf Dr Ing Groskopf Test system for three dimensional testing of object
US6252717B1 (en) 1996-12-12 2001-06-26 Rudolf E. Grosskopf Optical apparatus with an illumination grid and detector grid having an array of anamorphic lenses
DE19651667C2 (en) * 1996-12-12 2003-07-03 Rudolf Groskopf Device for three-dimensional examination of an object
KR20010045975A (en) * 1999-11-09 2001-06-05 조성환 a microscope a picture dealer an item change equipment
JP2006293222A (en) * 2005-04-14 2006-10-26 Olympus Corp Focus-detecting device
JP2008146060A (en) * 2006-12-12 2008-06-26 Instrument Technology Research Center National Applied Research Lab Automatic focus device and method thereof

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