JPS6453455A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6453455A JPS6453455A JP18050187A JP18050187A JPS6453455A JP S6453455 A JPS6453455 A JP S6453455A JP 18050187 A JP18050187 A JP 18050187A JP 18050187 A JP18050187 A JP 18050187A JP S6453455 A JPS6453455 A JP S6453455A
- Authority
- JP
- Japan
- Prior art keywords
- contact hole
- nitride film
- film
- mesa grooves
- patterning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18050187A JPS6453455A (en) | 1987-07-20 | 1987-07-20 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP18050187A JPS6453455A (en) | 1987-07-20 | 1987-07-20 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6453455A true JPS6453455A (en) | 1989-03-01 |
Family
ID=16084344
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP18050187A Pending JPS6453455A (en) | 1987-07-20 | 1987-07-20 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6453455A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6440941A (en) * | 1987-07-21 | 1989-02-13 | Minnesota Mining & Mfg | Uv photosensitive directly positive silver halide photographic element |
-
1987
- 1987-07-20 JP JP18050187A patent/JPS6453455A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6440941A (en) * | 1987-07-21 | 1989-02-13 | Minnesota Mining & Mfg | Uv photosensitive directly positive silver halide photographic element |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS5636143A (en) | Manufacture of semiconductor device | |
JPS57155769A (en) | Manufacture of semiconductor device | |
JPS6453455A (en) | Manufacture of semiconductor device | |
JPS5583267A (en) | Method of fabricating semiconductor device | |
JPS57204146A (en) | Manufacture of semiconductor device | |
JPS572519A (en) | Manufacture of semiconductor device | |
JPS57155772A (en) | Manufacture of semiconductor device | |
JPS55153325A (en) | Manufacture of semiconductor device | |
JPS571243A (en) | Manufacture of semiconductor device | |
JPS56111241A (en) | Preparation of semiconductor device | |
JPS5731153A (en) | Manufacture of semiconductor device | |
JPS5578568A (en) | Manufacture of semiconductor device | |
JPS56160051A (en) | Formation of insulating layer | |
JPS56101757A (en) | Manufacture of semiconductor device | |
JPS5596652A (en) | Method of fabricating semiconductor device | |
JPS5799752A (en) | Manufacture of semiconductor integrated circuit device | |
JPS54139486A (en) | Manufacture of semiconductor device | |
JPS5710246A (en) | Manufacture of semiconductor device | |
JPS6430244A (en) | Manufacture of semiconductor device | |
JPS57199231A (en) | Manufacture of semiconductor device | |
JPS5575234A (en) | Semiconductor device | |
JPS57199234A (en) | Semiconductor integrated circuit device and manufacture thereof | |
JPS647566A (en) | Manufacture of thin film transistor | |
JPS6427265A (en) | Manufacture of semiconductor device | |
JPS57190348A (en) | Manufacture of bipolar semiconductor device |