JPS645266B2 - - Google Patents
Info
- Publication number
- JPS645266B2 JPS645266B2 JP54138320A JP13832079A JPS645266B2 JP S645266 B2 JPS645266 B2 JP S645266B2 JP 54138320 A JP54138320 A JP 54138320A JP 13832079 A JP13832079 A JP 13832079A JP S645266 B2 JPS645266 B2 JP S645266B2
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- under test
- terminal
- semiconductor device
- ground
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012360 testing method Methods 0.000 claims description 27
- 239000004065 semiconductor Substances 0.000 claims description 11
- 238000007689 inspection Methods 0.000 claims description 6
- 239000004020 conductor Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 238000005259 measurement Methods 0.000 description 2
- 239000012777 electrically insulating material Substances 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13832079A JPS5661660A (en) | 1979-10-26 | 1979-10-26 | Handling device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13832079A JPS5661660A (en) | 1979-10-26 | 1979-10-26 | Handling device |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5661660A JPS5661660A (en) | 1981-05-27 |
JPS645266B2 true JPS645266B2 (US20070244113A1-20071018-C00087.png) | 1989-01-30 |
Family
ID=15219134
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13832079A Granted JPS5661660A (en) | 1979-10-26 | 1979-10-26 | Handling device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5661660A (US20070244113A1-20071018-C00087.png) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5616545Y2 (US20070244113A1-20071018-C00087.png) * | 1976-04-27 | 1981-04-17 |
-
1979
- 1979-10-26 JP JP13832079A patent/JPS5661660A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5661660A (en) | 1981-05-27 |
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