JPS6452372A - Analyzer for physical quantity of neutral particle - Google Patents
Analyzer for physical quantity of neutral particleInfo
- Publication number
- JPS6452372A JPS6452372A JP62209853A JP20985387A JPS6452372A JP S6452372 A JPS6452372 A JP S6452372A JP 62209853 A JP62209853 A JP 62209853A JP 20985387 A JP20985387 A JP 20985387A JP S6452372 A JPS6452372 A JP S6452372A
- Authority
- JP
- Japan
- Prior art keywords
- particles
- energy
- detectors
- cell
- constant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measurement Of Radiation (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
PURPOSE:To make neutral particles not get out from detectors on low energy side by electrically insulating one of a stripping cell and a vacuum chamber from the other and applying a constant voltage to it. CONSTITUTION:One of a stripping cell 2 for ionizing neutral particles to be analyzed and a vacuum chamber 1 including a magnetic pole 3 and an electrode 5 for giving a specific orbital operation to the particles ionized by this cell 2 and plural arranged detectors 6 for detecting the particles is electrically insulated from the other, and constant additional energy is further added to the energy of the ionized particles. Therefore, if the position of the detector of the minimum energy channel stays constant, the rotational radius of the ions incident in the minimum energy channel at the magnetic pole 3 is lessened by the additional energy. Accordingly, ion particles do not get out from the detectors 6, since may do not receive any end face effect at the electrode 5.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62209853A JPS6452372A (en) | 1987-08-24 | 1987-08-24 | Analyzer for physical quantity of neutral particle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62209853A JPS6452372A (en) | 1987-08-24 | 1987-08-24 | Analyzer for physical quantity of neutral particle |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6452372A true JPS6452372A (en) | 1989-02-28 |
Family
ID=16579704
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62209853A Pending JPS6452372A (en) | 1987-08-24 | 1987-08-24 | Analyzer for physical quantity of neutral particle |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6452372A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57119443A (en) * | 1981-01-19 | 1982-07-24 | Toshiba Corp | Charge exchange type neutral particle analyzer |
-
1987
- 1987-08-24 JP JP62209853A patent/JPS6452372A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57119443A (en) * | 1981-01-19 | 1982-07-24 | Toshiba Corp | Charge exchange type neutral particle analyzer |
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