JPS6435337A - Helium detector - Google Patents

Helium detector

Info

Publication number
JPS6435337A
JPS6435337A JP19316487A JP19316487A JPS6435337A JP S6435337 A JPS6435337 A JP S6435337A JP 19316487 A JP19316487 A JP 19316487A JP 19316487 A JP19316487 A JP 19316487A JP S6435337 A JPS6435337 A JP S6435337A
Authority
JP
Japan
Prior art keywords
tube
permanent magnets
analysis tube
analysis
penning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19316487A
Other languages
Japanese (ja)
Inventor
Kiyoshi Narita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP19316487A priority Critical patent/JPS6435337A/en
Publication of JPS6435337A publication Critical patent/JPS6435337A/en
Pending legal-status Critical Current

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  • Examining Or Testing Airtightness (AREA)
  • Measuring Fluid Pressure (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)

Abstract

PURPOSE:To decrease the number of parts and to make effective utilization of space by integrally constituting an analysis tube and Penning vacuum tube. CONSTITUTION:Permanent magnets 32, 3 of the analysis tube are commonly used as the permanent magnets of the Penning vacuum tube. Electrodes for cold cathode ionization are disposed between the permanent magnets 2 and 3 of the analysis tube and within a vacuum system 1. The electrons released from the electrode (cathode) make spiral motion by magnetic fields and the gaseous helium in the vacuum system 1 are ionized when a high voltage is impressed between the electrodes 9 and 10. These ions collide against the electrode (anode). Ion current is induced in the circuit by this phenomenon and is detected by an ion current detector. Since the permanent magnets 2, 3 of the analysis tube and the Penning vacuum tube are commonly used in such a manner, the number of parts is decreased and the space is effectively utilized.
JP19316487A 1987-07-31 1987-07-31 Helium detector Pending JPS6435337A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19316487A JPS6435337A (en) 1987-07-31 1987-07-31 Helium detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19316487A JPS6435337A (en) 1987-07-31 1987-07-31 Helium detector

Publications (1)

Publication Number Publication Date
JPS6435337A true JPS6435337A (en) 1989-02-06

Family

ID=16303355

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19316487A Pending JPS6435337A (en) 1987-07-31 1987-07-31 Helium detector

Country Status (1)

Country Link
JP (1) JPS6435337A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02298834A (en) * 1989-05-12 1990-12-11 Ulvac Corp Inspecting apparatus of leakage of gas
JP2003021100A (en) * 2001-07-06 2003-01-24 Tokico Ltd Ejector and negative pressure supply device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02298834A (en) * 1989-05-12 1990-12-11 Ulvac Corp Inspecting apparatus of leakage of gas
JP2003021100A (en) * 2001-07-06 2003-01-24 Tokico Ltd Ejector and negative pressure supply device

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