JPS57134855A - Ionization vacuum gauge - Google Patents

Ionization vacuum gauge

Info

Publication number
JPS57134855A
JPS57134855A JP1963481A JP1963481A JPS57134855A JP S57134855 A JPS57134855 A JP S57134855A JP 1963481 A JP1963481 A JP 1963481A JP 1963481 A JP1963481 A JP 1963481A JP S57134855 A JPS57134855 A JP S57134855A
Authority
JP
Japan
Prior art keywords
electrode
filament
grid
electron
vacuum gauge
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1963481A
Other languages
Japanese (ja)
Other versions
JPH0251209B2 (en
Inventor
Shinji Osako
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Anelva Corp filed Critical Anelva Corp
Priority to JP1963481A priority Critical patent/JPS57134855A/en
Publication of JPS57134855A publication Critical patent/JPS57134855A/en
Publication of JPH0251209B2 publication Critical patent/JPH0251209B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes

Landscapes

  • Measuring Fluid Pressure (AREA)

Abstract

PURPOSE:To sharply improve the characteristic in a low vacuum range by introducing a shielded electrode. CONSTITUTION:The thermions emitted from the filament electrode 5 heated through electric conduction by the power source outside the vacuum part are accelerated in the direction of a grid electrode 4 by the electric field due to the filament electrode 5, shielded electrode 6, and the grid electrode 4, and oscillated between the coils of the grid electrode 4, then ionize the gas particles in the grid coils, and are captured by the grid electrode 4. The current of electron emitted from the filament is measured by the electron-current measuring circuit installed between the filament electrode 5 and the ground potential, and the measured value is put into feedback into a filament ignition circuit, and the electron current is kept constant. With such a vacuum gauge, certain measurement is performed in 10<-2>-10<-3> Torr range where measurement is unstable or impossible with a conventional B-A type ionization vacuum gauge.
JP1963481A 1981-02-13 1981-02-13 Ionization vacuum gauge Granted JPS57134855A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1963481A JPS57134855A (en) 1981-02-13 1981-02-13 Ionization vacuum gauge

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1963481A JPS57134855A (en) 1981-02-13 1981-02-13 Ionization vacuum gauge

Publications (2)

Publication Number Publication Date
JPS57134855A true JPS57134855A (en) 1982-08-20
JPH0251209B2 JPH0251209B2 (en) 1990-11-06

Family

ID=12004636

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1963481A Granted JPS57134855A (en) 1981-02-13 1981-02-13 Ionization vacuum gauge

Country Status (1)

Country Link
JP (1) JPS57134855A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0537770A2 (en) * 1991-10-17 1993-04-21 Granville-Phillips Company Ionization gauge and method of using and calibrating same
KR100598273B1 (en) * 2002-09-18 2006-07-07 동부일렉트로닉스 주식회사 Hot cathode ion gage
JP2019215195A (en) * 2018-06-11 2019-12-19 株式会社アルバック Ba type ionization gauge, abnormal sensitivity detection method, and pressure measurement method using ba type ionization gauge

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5452582A (en) * 1977-10-03 1979-04-25 Nippon Bunko Kogyo Kk Ion gauge for very high vacuum

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5452582A (en) * 1977-10-03 1979-04-25 Nippon Bunko Kogyo Kk Ion gauge for very high vacuum

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0537770A2 (en) * 1991-10-17 1993-04-21 Granville-Phillips Company Ionization gauge and method of using and calibrating same
KR100598273B1 (en) * 2002-09-18 2006-07-07 동부일렉트로닉스 주식회사 Hot cathode ion gage
JP2019215195A (en) * 2018-06-11 2019-12-19 株式会社アルバック Ba type ionization gauge, abnormal sensitivity detection method, and pressure measurement method using ba type ionization gauge

Also Published As

Publication number Publication date
JPH0251209B2 (en) 1990-11-06

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