JPS5730256A - Ion scattering spectral analyzer - Google Patents
Ion scattering spectral analyzerInfo
- Publication number
- JPS5730256A JPS5730256A JP10532780A JP10532780A JPS5730256A JP S5730256 A JPS5730256 A JP S5730256A JP 10532780 A JP10532780 A JP 10532780A JP 10532780 A JP10532780 A JP 10532780A JP S5730256 A JPS5730256 A JP S5730256A
- Authority
- JP
- Japan
- Prior art keywords
- ion
- potential
- spectrograph
- power source
- mass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/26—Mass spectrometers or separator tubes
- H01J49/34—Dynamic spectrometers
- H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Analysing Materials By The Use Of Radiation (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Electron Tubes For Measurement (AREA)
Abstract
PURPOSE:To improve the detection sensibility of the scattering ion and the quantitative performance by removing the obstacle ion against the scattering ion by means of a triple pole mass-spectrograph. CONSTITUTION:Constant potential is applied by a D.C. power source 8 between an energy analyzer 4 and a mass-spectrograph 6, and the ion applied from the energy analyzer 4 to the mass-spectrograph 6 is decelerated by the electric field bases on said potential. The energy analyzer 4 will bring the voltage applied between a double cell electrodes constant thus to bring the intermediate potential equal to such potential as applied from a power source 9 onto a specimen 3, and performing the energy scanning by varying the voltage of the power source 9.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10532780A JPS5730256A (en) | 1980-07-30 | 1980-07-30 | Ion scattering spectral analyzer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10532780A JPS5730256A (en) | 1980-07-30 | 1980-07-30 | Ion scattering spectral analyzer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5730256A true JPS5730256A (en) | 1982-02-18 |
JPH0223974B2 JPH0223974B2 (en) | 1990-05-28 |
Family
ID=14404617
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10532780A Granted JPS5730256A (en) | 1980-07-30 | 1980-07-30 | Ion scattering spectral analyzer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5730256A (en) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51144291A (en) * | 1975-06-06 | 1976-12-11 | Ulvac Corp | Ionic mass spectrometer |
-
1980
- 1980-07-30 JP JP10532780A patent/JPS5730256A/en active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS51144291A (en) * | 1975-06-06 | 1976-12-11 | Ulvac Corp | Ionic mass spectrometer |
Also Published As
Publication number | Publication date |
---|---|
JPH0223974B2 (en) | 1990-05-28 |
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