JPS5730256A - Ion scattering spectral analyzer - Google Patents

Ion scattering spectral analyzer

Info

Publication number
JPS5730256A
JPS5730256A JP10532780A JP10532780A JPS5730256A JP S5730256 A JPS5730256 A JP S5730256A JP 10532780 A JP10532780 A JP 10532780A JP 10532780 A JP10532780 A JP 10532780A JP S5730256 A JPS5730256 A JP S5730256A
Authority
JP
Japan
Prior art keywords
ion
potential
spectrograph
power source
mass
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10532780A
Other languages
Japanese (ja)
Other versions
JPH0223974B2 (en
Inventor
Masabumi Jinno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP10532780A priority Critical patent/JPS5730256A/en
Publication of JPS5730256A publication Critical patent/JPS5730256A/en
Publication of JPH0223974B2 publication Critical patent/JPH0223974B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J49/00—Particle spectrometers or separator tubes
    • H01J49/26—Mass spectrometers or separator tubes
    • H01J49/34—Dynamic spectrometers
    • H01J49/42—Stability-of-path spectrometers, e.g. monopole, quadrupole, multipole, farvitrons

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
  • Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
  • Electron Tubes For Measurement (AREA)

Abstract

PURPOSE:To improve the detection sensibility of the scattering ion and the quantitative performance by removing the obstacle ion against the scattering ion by means of a triple pole mass-spectrograph. CONSTITUTION:Constant potential is applied by a D.C. power source 8 between an energy analyzer 4 and a mass-spectrograph 6, and the ion applied from the energy analyzer 4 to the mass-spectrograph 6 is decelerated by the electric field bases on said potential. The energy analyzer 4 will bring the voltage applied between a double cell electrodes constant thus to bring the intermediate potential equal to such potential as applied from a power source 9 onto a specimen 3, and performing the energy scanning by varying the voltage of the power source 9.
JP10532780A 1980-07-30 1980-07-30 Ion scattering spectral analyzer Granted JPS5730256A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10532780A JPS5730256A (en) 1980-07-30 1980-07-30 Ion scattering spectral analyzer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10532780A JPS5730256A (en) 1980-07-30 1980-07-30 Ion scattering spectral analyzer

Publications (2)

Publication Number Publication Date
JPS5730256A true JPS5730256A (en) 1982-02-18
JPH0223974B2 JPH0223974B2 (en) 1990-05-28

Family

ID=14404617

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10532780A Granted JPS5730256A (en) 1980-07-30 1980-07-30 Ion scattering spectral analyzer

Country Status (1)

Country Link
JP (1) JPS5730256A (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51144291A (en) * 1975-06-06 1976-12-11 Ulvac Corp Ionic mass spectrometer

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51144291A (en) * 1975-06-06 1976-12-11 Ulvac Corp Ionic mass spectrometer

Also Published As

Publication number Publication date
JPH0223974B2 (en) 1990-05-28

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