JPS6451957A - Manufacture of thermal head - Google Patents

Manufacture of thermal head

Info

Publication number
JPS6451957A
JPS6451957A JP20961887A JP20961887A JPS6451957A JP S6451957 A JPS6451957 A JP S6451957A JP 20961887 A JP20961887 A JP 20961887A JP 20961887 A JP20961887 A JP 20961887A JP S6451957 A JPS6451957 A JP S6451957A
Authority
JP
Japan
Prior art keywords
heat generating
generating element
element layer
layer
thermal resistor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20961887A
Other languages
Japanese (ja)
Inventor
Akihiro Korechika
Keizaburo Kuramasu
Kiyoharu Yamashita
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP20961887A priority Critical patent/JPS6451957A/en
Publication of JPS6451957A publication Critical patent/JPS6451957A/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/315—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material
    • B41J2/32—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by selective application of heat to a heat sensitive printing or impression-transfer material using thermal heads
    • B41J2/335—Structure of thermal heads

Abstract

PURPOSE:To obtain a thermal head which is structurally simple and qualitatively reliable and can accommodate the projecting condition of the heat generating part of a thermal head by first forming a thermal resistor of a more than two-tier structure and limiting the thickness of a conductive membrane layer so that at least, it may be smaller than the thickness of the removed layer of the thermal resistor, with the bottom layer of the thermal resistor kept intact. CONSTITUTION:A bottom heat generating element layer 9 of TiC and SiO and a top heat generating element layer 9 of SiO2 and an intermediate heat generating element layer 8 are formed in a laminated style to provide a membrane thermal resistor 10. Next, a photoresist pattern 11 is formed only in an area which becomes a heat generating part, and the top heat generating element layer 9 of SiO2 is removed except the area which becomes a heat generating part, using etching technique. At that time, the intermediate heat generating element layer 8 of Si acts as an etching buffer layer, so that the bottom heat generating element layer below is not eroded. Subsequently, the intermediate heat generating element layer 8 and the bottom heat generating element layer 7 remain solid. After removal of the photoresist pattern 11, an electrode 12 is formed over the entire area of the pattern in such a manner that its membrane thickness becomes smaller than that of the top heat generating element layer 9.
JP20961887A 1987-08-24 1987-08-24 Manufacture of thermal head Pending JPS6451957A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20961887A JPS6451957A (en) 1987-08-24 1987-08-24 Manufacture of thermal head

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20961887A JPS6451957A (en) 1987-08-24 1987-08-24 Manufacture of thermal head

Publications (1)

Publication Number Publication Date
JPS6451957A true JPS6451957A (en) 1989-02-28

Family

ID=16575779

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20961887A Pending JPS6451957A (en) 1987-08-24 1987-08-24 Manufacture of thermal head

Country Status (1)

Country Link
JP (1) JPS6451957A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100079551A1 (en) * 2007-05-29 2010-04-01 Canon Kabushiki Kaisha Substrate for liquid discharge head, method of manufacturing the same, and liquid discharge head using such substrate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20100079551A1 (en) * 2007-05-29 2010-04-01 Canon Kabushiki Kaisha Substrate for liquid discharge head, method of manufacturing the same, and liquid discharge head using such substrate

Similar Documents

Publication Publication Date Title
JPS6413739A (en) Manufacture of order-made integrated circuit
JPS6450446A (en) Method and structure for integrated circuit pad contact
JPS6451957A (en) Manufacture of thermal head
JPS57115373A (en) Thermal head
JPS5720374A (en) Method of forming crossover in thermal head
JPS5689968A (en) Manufacturing of thermal head
JPS57101668A (en) Etching method
JPS5793172A (en) Thermal head
JPS5724274A (en) Manufacture of thermal head for heat-sensitive recording
JPS5474689A (en) Semiconductor laser device and its manufacture
JPS644363A (en) Thermal head
JPS56110283A (en) Manufacture of embedded circuit structure-type semiconductor laser device
JPS54152984A (en) Manufacture of semiconductor device
JPS57198647A (en) Semiconductor device and manufacture therefor
JPS61235165A (en) Manufacture of thermal head
JPS5757677A (en) Manufacture of heat-sensitive printing head
JPH0167038U (en)
JPS55105392A (en) Semiconductor laser device and its manufacture
JPS5949982A (en) Heat-sensitive head
JPS56154070A (en) Thermal head
JPS5724558A (en) Semicondctor device
JPS6447958A (en) Contact probe
JPS54121141A (en) Thermal head
JPS5489645A (en) Heat recording printing head
JPS5662341A (en) Formation of bump electrode