JPH0167038U - - Google Patents
Info
- Publication number
- JPH0167038U JPH0167038U JP1987161623U JP16162387U JPH0167038U JP H0167038 U JPH0167038 U JP H0167038U JP 1987161623 U JP1987161623 U JP 1987161623U JP 16162387 U JP16162387 U JP 16162387U JP H0167038 U JPH0167038 U JP H0167038U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- inkjet head
- protrusion
- silicon
- glass
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 9
- 239000011521 glass Substances 0.000 claims description 4
- 229910052710 silicon Inorganic materials 0.000 claims description 3
- 239000010703 silicon Substances 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims 1
- 239000010410 layer Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000005338 heat storage Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Description
第１図は本考案を実施したインクジエツトヘツ
ド基板の概略平面図、第２図は同基板とガラス板
との接合工程を示す図、第３図は同第１図中の
−線に沿つた断面図、第４図は一般的なインク
ジエツトヘツドの要部平面図、第５図は第４図中
の−線に沿つた断面図、第６図はアルミナ基
板にグレーズを設けたインクジエツトヘツド基板
の平面図、第７図は第６図中の−線に沿つた
概略断面図である。
２０……シリコンの基板、２１……突部、２２
……電極板、２３……バツテリー、２４……電源
、２５……蓄熱層、２６……発熱抵抗体層、２７
……導体層、２８……発熱部、２９……保護層、
Ｇ……ガラス板。
Fig. 1 is a schematic plan view of an inkjet head substrate embodying the present invention, Fig. 2 is a diagram showing the bonding process between the substrate and a glass plate, and Fig. 3 is a diagram taken along the - line in Fig. 1. 4 is a plan view of essential parts of a general inkjet head, FIG. 5 is a sectional view taken along the - line in FIG. 4, and FIG. 6 is an inkjet head with a glaze provided on an alumina substrate. The plan view of the substrate, FIG. 7, is a schematic sectional view taken along the - line in FIG. 20...Silicon substrate, 21...Protrusion, 22
... Electrode plate, 23 ... Battery, 24 ... Power supply, 25 ... Heat storage layer, 26 ... Heat generating resistor layer, 27
... Conductor layer, 28 ... Heat generating part, 29 ... Protective layer,
G...Glass plate.
Claims (1)
る突部を形成し、その突部上に発熱部を形成して
あることを特徴とするインクジエツトヘツド基板
の構造。 (2) 前記ガラスは基板を成形するシリコンと熱
膨張係数が略等しいものとし、陽極接合ののちエ
ツチングによつて不要部分を外して突部を形成し
たものであることを特徴とする登録請求の範囲第
１項に記載のインクジエツトヘツド基板の構造。[Claims for Utility Model Registration] (1) Structure of an inkjet head substrate characterized in that a protrusion made of glass is formed on a substrate molded from silicon, and a heat generating part is formed on the protrusion. . (2) The above-mentioned glass has a coefficient of thermal expansion substantially equal to that of the silicon used to form the substrate, and after anodic bonding, unnecessary parts are removed by etching to form protrusions. The structure of the inkjet head substrate according to scope 1.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161623U JPH077167Y2 (en) | 1987-10-22 | 1987-10-22 | Structure of inkjet head substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161623U JPH077167Y2 (en) | 1987-10-22 | 1987-10-22 | Structure of inkjet head substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0167038U true JPH0167038U (en) | 1989-04-28 |
| JPH077167Y2 JPH077167Y2 (en) | 1995-02-22 |
Family
ID=31444729
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987161623U Expired - Lifetime JPH077167Y2 (en) | 1987-10-22 | 1987-10-22 | Structure of inkjet head substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH077167Y2 (en) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6442246A (en) * | 1987-08-07 | 1989-02-14 | Nec Corp | Ink jet recording head |
-
1987
- 1987-10-22 JP JP1987161623U patent/JPH077167Y2/en not_active Expired - Lifetime
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6442246A (en) * | 1987-08-07 | 1989-02-14 | Nec Corp | Ink jet recording head |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH077167Y2 (en) | 1995-02-22 |