JPS6447958A - Contact probe - Google Patents
Contact probeInfo
- Publication number
- JPS6447958A JPS6447958A JP20559787A JP20559787A JPS6447958A JP S6447958 A JPS6447958 A JP S6447958A JP 20559787 A JP20559787 A JP 20559787A JP 20559787 A JP20559787 A JP 20559787A JP S6447958 A JPS6447958 A JP S6447958A
- Authority
- JP
- Japan
- Prior art keywords
- patterns
- electrode
- slit
- contact probe
- pattern
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Measuring Leads Or Probes (AREA)
Abstract
PURPOSE:To facilitate electric conduction having an electrode pattern over a high density, covering fine and large area, by arranging electrode patterns and a slit on a contact probe substrate. CONSTITUTION:Electrode patterns 2 are formed on a contact probe substrate 1a and moreover, a slit 3 is provided between electrodes. A substrate 1a with a low thermal expansion coefficient is used to form a highly accurate pattern 2 with limited deformation in a process where the electrode patterns 2 are formed at a fine pitch. The patterns 2 are made flexible by the slit 3 formed between the patterns 2 to improve adhesion of an object part with the pattern 2. Moreover, the patterns 2 are made in surface contact to prevent deterioration in the quality of the part otherwise caused by any flaw on an electrode as object part while permitting manufacture of highly accurate, high density fine patterns 2 at a low cost.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20559787A JPS6447958A (en) | 1987-08-19 | 1987-08-19 | Contact probe |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20559787A JPS6447958A (en) | 1987-08-19 | 1987-08-19 | Contact probe |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6447958A true JPS6447958A (en) | 1989-02-22 |
Family
ID=16509510
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20559787A Pending JPS6447958A (en) | 1987-08-19 | 1987-08-19 | Contact probe |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6447958A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0462479A (en) * | 1990-06-29 | 1992-02-27 | Sharp Corp | Electric inspecting method for semiconductor device |
-
1987
- 1987-08-19 JP JP20559787A patent/JPS6447958A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0462479A (en) * | 1990-06-29 | 1992-02-27 | Sharp Corp | Electric inspecting method for semiconductor device |
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