JPS6449146A - Semiconductor disk memory and production thereof - Google Patents
Semiconductor disk memory and production thereofInfo
- Publication number
- JPS6449146A JPS6449146A JP62206015A JP20601587A JPS6449146A JP S6449146 A JPS6449146 A JP S6449146A JP 62206015 A JP62206015 A JP 62206015A JP 20601587 A JP20601587 A JP 20601587A JP S6449146 A JPS6449146 A JP S6449146A
- Authority
- JP
- Japan
- Prior art keywords
- projecting parts
- track guides
- film
- silicon nitride
- films
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Memories (AREA)
Abstract
PURPOSE:To execute precise tracking and to improve durability by forming projecting parts on a substrate, filling the unprojecting regions of a film having an electric charge accumulation function with high dielectric constant films to flatten the surface and using the projecting parts as the reference for tracking control. CONSTITUTION:The track guides 10 which are the projecting parts to delineate the recording tracks 9 are formed on the semiconductor substrate 7 and the insulating film consisting of a silicon oxide film 11 is formed between the projecting parts and the projecting parts. The silicon nitride film 12 having the electric charge accumulation function is then formed on the surfaces of the track guides 10 and the silicon oxide film 11. High dielectric constant tantalum oxide films 13 are formed in the regions which are not the track guides 10 on the silicon nitride film 12 to flatten the surface. The sliding contact of a stylus S and the silicon nitride film 12 in the region of the recording tracks 9 is eliminated and the wearing and flawing of the films are prevented by constituting the semiconductor disk memory in such a manner. In addition, the tracking control with high accuracy is enabled by the track guides 10.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62206015A JPS6449146A (en) | 1987-08-19 | 1987-08-19 | Semiconductor disk memory and production thereof |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62206015A JPS6449146A (en) | 1987-08-19 | 1987-08-19 | Semiconductor disk memory and production thereof |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6449146A true JPS6449146A (en) | 1989-02-23 |
Family
ID=16516496
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62206015A Pending JPS6449146A (en) | 1987-08-19 | 1987-08-19 | Semiconductor disk memory and production thereof |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6449146A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0398656A2 (en) * | 1989-05-16 | 1990-11-22 | Victor Company Of Japan, Ltd. | Electric charge image recording medium and recording/reproducing apparatus |
-
1987
- 1987-08-19 JP JP62206015A patent/JPS6449146A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0398656A2 (en) * | 1989-05-16 | 1990-11-22 | Victor Company Of Japan, Ltd. | Electric charge image recording medium and recording/reproducing apparatus |
EP0398656A3 (en) * | 1989-05-16 | 1991-02-06 | Victor Company Of Japan, Ltd. | Electric charge image recording medium and recording/reproducing apparatus |
US5226029A (en) * | 1989-05-16 | 1993-07-06 | Victor Company Of Japan | Electric charge image recording medium and recording/reproducing apparatus |
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