JPS6449146A - Semiconductor disk memory and production thereof - Google Patents

Semiconductor disk memory and production thereof

Info

Publication number
JPS6449146A
JPS6449146A JP62206015A JP20601587A JPS6449146A JP S6449146 A JPS6449146 A JP S6449146A JP 62206015 A JP62206015 A JP 62206015A JP 20601587 A JP20601587 A JP 20601587A JP S6449146 A JPS6449146 A JP S6449146A
Authority
JP
Japan
Prior art keywords
projecting parts
track guides
film
silicon nitride
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62206015A
Other languages
Japanese (ja)
Inventor
Yuichi Soma
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Victor Company of Japan Ltd
Original Assignee
Victor Company of Japan Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Victor Company of Japan Ltd filed Critical Victor Company of Japan Ltd
Priority to JP62206015A priority Critical patent/JPS6449146A/en
Publication of JPS6449146A publication Critical patent/JPS6449146A/en
Pending legal-status Critical Current

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  • Semiconductor Memories (AREA)

Abstract

PURPOSE:To execute precise tracking and to improve durability by forming projecting parts on a substrate, filling the unprojecting regions of a film having an electric charge accumulation function with high dielectric constant films to flatten the surface and using the projecting parts as the reference for tracking control. CONSTITUTION:The track guides 10 which are the projecting parts to delineate the recording tracks 9 are formed on the semiconductor substrate 7 and the insulating film consisting of a silicon oxide film 11 is formed between the projecting parts and the projecting parts. The silicon nitride film 12 having the electric charge accumulation function is then formed on the surfaces of the track guides 10 and the silicon oxide film 11. High dielectric constant tantalum oxide films 13 are formed in the regions which are not the track guides 10 on the silicon nitride film 12 to flatten the surface. The sliding contact of a stylus S and the silicon nitride film 12 in the region of the recording tracks 9 is eliminated and the wearing and flawing of the films are prevented by constituting the semiconductor disk memory in such a manner. In addition, the tracking control with high accuracy is enabled by the track guides 10.
JP62206015A 1987-08-19 1987-08-19 Semiconductor disk memory and production thereof Pending JPS6449146A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62206015A JPS6449146A (en) 1987-08-19 1987-08-19 Semiconductor disk memory and production thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62206015A JPS6449146A (en) 1987-08-19 1987-08-19 Semiconductor disk memory and production thereof

Publications (1)

Publication Number Publication Date
JPS6449146A true JPS6449146A (en) 1989-02-23

Family

ID=16516496

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62206015A Pending JPS6449146A (en) 1987-08-19 1987-08-19 Semiconductor disk memory and production thereof

Country Status (1)

Country Link
JP (1) JPS6449146A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0398656A2 (en) * 1989-05-16 1990-11-22 Victor Company Of Japan, Ltd. Electric charge image recording medium and recording/reproducing apparatus

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0398656A2 (en) * 1989-05-16 1990-11-22 Victor Company Of Japan, Ltd. Electric charge image recording medium and recording/reproducing apparatus
EP0398656A3 (en) * 1989-05-16 1991-02-06 Victor Company Of Japan, Ltd. Electric charge image recording medium and recording/reproducing apparatus
US5226029A (en) * 1989-05-16 1993-07-06 Victor Company Of Japan Electric charge image recording medium and recording/reproducing apparatus

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