JPS6448022U - - Google Patents
Info
- Publication number
- JPS6448022U JPS6448022U JP14273987U JP14273987U JPS6448022U JP S6448022 U JPS6448022 U JP S6448022U JP 14273987 U JP14273987 U JP 14273987U JP 14273987 U JP14273987 U JP 14273987U JP S6448022 U JPS6448022 U JP S6448022U
- Authority
- JP
- Japan
- Prior art keywords
- insulating material
- cooling fluid
- heat insulating
- semiconductor
- heat
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000011810 insulating material Substances 0.000 claims description 8
- 239000012809 cooling fluid Substances 0.000 claims description 6
- 238000010438 heat treatment Methods 0.000 claims description 6
- 239000004065 semiconductor Substances 0.000 claims description 6
- 239000000835 fiber Substances 0.000 claims 1
- 238000010304 firing Methods 0.000 claims 1
- 238000002791 soaking Methods 0.000 description 1
Landscapes
- Furnace Details (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987142739U JPH0519950Y2 (is) | 1987-09-18 | 1987-09-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987142739U JPH0519950Y2 (is) | 1987-09-18 | 1987-09-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6448022U true JPS6448022U (is) | 1989-03-24 |
JPH0519950Y2 JPH0519950Y2 (is) | 1993-05-25 |
Family
ID=31408943
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987142739U Expired - Lifetime JPH0519950Y2 (is) | 1987-09-18 | 1987-09-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0519950Y2 (is) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006351774A (ja) * | 2005-06-15 | 2006-12-28 | Tokyo Electron Ltd | 熱処理装置、ヒータ及びヒータの製造方法 |
WO2007097199A1 (ja) * | 2006-02-20 | 2007-08-30 | Tokyo Electron Limited | 熱処理装置、ヒータ及びその製造方法 |
JP2011138936A (ja) * | 2009-12-28 | 2011-07-14 | Hitachi Kokusai Electric Inc | 加熱装置 |
JP2014079990A (ja) * | 2012-10-18 | 2014-05-08 | Tokyo Electron Ltd | 断熱壁体の製造方法及び断熱壁体 |
JP2015040323A (ja) * | 2013-08-21 | 2015-03-02 | 東京エレクトロン株式会社 | 断熱壁体の製造方法 |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56146227A (en) * | 1980-04-16 | 1981-11-13 | Hitachi Ltd | Heat treatment furnace |
JPS59143039U (ja) * | 1983-03-11 | 1984-09-25 | 富士通株式会社 | 加熱炉 |
JPS61241916A (ja) * | 1985-04-18 | 1986-10-28 | Deisuko Saiyaa Japan:Kk | 半導体熱処理装置 |
-
1987
- 1987-09-18 JP JP1987142739U patent/JPH0519950Y2/ja not_active Expired - Lifetime
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS56146227A (en) * | 1980-04-16 | 1981-11-13 | Hitachi Ltd | Heat treatment furnace |
JPS59143039U (ja) * | 1983-03-11 | 1984-09-25 | 富士通株式会社 | 加熱炉 |
JPS61241916A (ja) * | 1985-04-18 | 1986-10-28 | Deisuko Saiyaa Japan:Kk | 半導体熱処理装置 |
Cited By (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2006351774A (ja) * | 2005-06-15 | 2006-12-28 | Tokyo Electron Ltd | 熱処理装置、ヒータ及びヒータの製造方法 |
EP1895575A1 (en) * | 2005-06-15 | 2008-03-05 | Tokyo Electron Limited | Heat treatment apparatus |
EP1895575A4 (en) * | 2005-06-15 | 2009-10-21 | Tokyo Electron Ltd | HEAT TREATMENT DEVICE |
JP4607678B2 (ja) * | 2005-06-15 | 2011-01-05 | 東京エレクトロン株式会社 | 熱処理装置、ヒータ及びヒータの製造方法 |
WO2007097199A1 (ja) * | 2006-02-20 | 2007-08-30 | Tokyo Electron Limited | 熱処理装置、ヒータ及びその製造方法 |
JP2011138936A (ja) * | 2009-12-28 | 2011-07-14 | Hitachi Kokusai Electric Inc | 加熱装置 |
JP2014079990A (ja) * | 2012-10-18 | 2014-05-08 | Tokyo Electron Ltd | 断熱壁体の製造方法及び断熱壁体 |
JP2015040323A (ja) * | 2013-08-21 | 2015-03-02 | 東京エレクトロン株式会社 | 断熱壁体の製造方法 |
Also Published As
Publication number | Publication date |
---|---|
JPH0519950Y2 (is) | 1993-05-25 |
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