JPS6448022U - - Google Patents

Info

Publication number
JPS6448022U
JPS6448022U JP14273987U JP14273987U JPS6448022U JP S6448022 U JPS6448022 U JP S6448022U JP 14273987 U JP14273987 U JP 14273987U JP 14273987 U JP14273987 U JP 14273987U JP S6448022 U JPS6448022 U JP S6448022U
Authority
JP
Japan
Prior art keywords
insulating material
cooling fluid
heat insulating
semiconductor
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14273987U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0519950Y2 (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987142739U priority Critical patent/JPH0519950Y2/ja
Publication of JPS6448022U publication Critical patent/JPS6448022U/ja
Application granted granted Critical
Publication of JPH0519950Y2 publication Critical patent/JPH0519950Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
JP1987142739U 1987-09-18 1987-09-18 Expired - Lifetime JPH0519950Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987142739U JPH0519950Y2 (en, 2012) 1987-09-18 1987-09-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987142739U JPH0519950Y2 (en, 2012) 1987-09-18 1987-09-18

Publications (2)

Publication Number Publication Date
JPS6448022U true JPS6448022U (en, 2012) 1989-03-24
JPH0519950Y2 JPH0519950Y2 (en, 2012) 1993-05-25

Family

ID=31408943

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987142739U Expired - Lifetime JPH0519950Y2 (en, 2012) 1987-09-18 1987-09-18

Country Status (1)

Country Link
JP (1) JPH0519950Y2 (en, 2012)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006351774A (ja) * 2005-06-15 2006-12-28 Tokyo Electron Ltd 熱処理装置、ヒータ及びヒータの製造方法
WO2007097199A1 (ja) * 2006-02-20 2007-08-30 Tokyo Electron Limited 熱処理装置、ヒータ及びその製造方法
JP2011138936A (ja) * 2009-12-28 2011-07-14 Hitachi Kokusai Electric Inc 加熱装置
JP2014079990A (ja) * 2012-10-18 2014-05-08 Tokyo Electron Ltd 断熱壁体の製造方法及び断熱壁体
JP2015040323A (ja) * 2013-08-21 2015-03-02 東京エレクトロン株式会社 断熱壁体の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146227A (en) * 1980-04-16 1981-11-13 Hitachi Ltd Heat treatment furnace
JPS59143039U (ja) * 1983-03-11 1984-09-25 富士通株式会社 加熱炉
JPS61241916A (ja) * 1985-04-18 1986-10-28 Deisuko Saiyaa Japan:Kk 半導体熱処理装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56146227A (en) * 1980-04-16 1981-11-13 Hitachi Ltd Heat treatment furnace
JPS59143039U (ja) * 1983-03-11 1984-09-25 富士通株式会社 加熱炉
JPS61241916A (ja) * 1985-04-18 1986-10-28 Deisuko Saiyaa Japan:Kk 半導体熱処理装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006351774A (ja) * 2005-06-15 2006-12-28 Tokyo Electron Ltd 熱処理装置、ヒータ及びヒータの製造方法
EP1895575A4 (en) * 2005-06-15 2009-10-21 Tokyo Electron Ltd HEAT TREATMENT DEVICE
WO2007097199A1 (ja) * 2006-02-20 2007-08-30 Tokyo Electron Limited 熱処理装置、ヒータ及びその製造方法
JP2011138936A (ja) * 2009-12-28 2011-07-14 Hitachi Kokusai Electric Inc 加熱装置
JP2014079990A (ja) * 2012-10-18 2014-05-08 Tokyo Electron Ltd 断熱壁体の製造方法及び断熱壁体
JP2015040323A (ja) * 2013-08-21 2015-03-02 東京エレクトロン株式会社 断熱壁体の製造方法

Also Published As

Publication number Publication date
JPH0519950Y2 (en, 2012) 1993-05-25

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