JPS6447850A - Manufacture of thermoelement - Google Patents
Manufacture of thermoelementInfo
- Publication number
- JPS6447850A JPS6447850A JP62201877A JP20187787A JPS6447850A JP S6447850 A JPS6447850 A JP S6447850A JP 62201877 A JP62201877 A JP 62201877A JP 20187787 A JP20187787 A JP 20187787A JP S6447850 A JPS6447850 A JP S6447850A
- Authority
- JP
- Japan
- Prior art keywords
- fine grains
- silicides
- atoms
- transition metals
- film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 229910021332 silicide Inorganic materials 0.000 abstract 3
- 229910052723 transition metal Inorganic materials 0.000 abstract 3
- 150000003624 transition metals Chemical class 0.000 abstract 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 abstract 2
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 2
- 239000001301 oxygen Substances 0.000 abstract 2
- 229910052760 oxygen Inorganic materials 0.000 abstract 2
- 229910005331 FeSi2 Inorganic materials 0.000 abstract 1
- 229910052786 argon Inorganic materials 0.000 abstract 1
- 238000006243 chemical reaction Methods 0.000 abstract 1
- 238000001816 cooling Methods 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 239000002994 raw material Substances 0.000 abstract 1
- 239000004065 semiconductor Substances 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
- 238000007740 vapor deposition Methods 0.000 abstract 1
- 230000008016 vaporization Effects 0.000 abstract 1
- 238000009834 vaporization Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N10/00—Thermoelectric devices comprising a junction of dissimilar materials, i.e. devices exhibiting Seebeck or Peltier effects
- H10N10/01—Manufacture or treatment
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62201877A JPS6447850A (en) | 1987-08-14 | 1987-08-14 | Manufacture of thermoelement |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62201877A JPS6447850A (en) | 1987-08-14 | 1987-08-14 | Manufacture of thermoelement |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6447850A true JPS6447850A (en) | 1989-02-22 |
Family
ID=16448346
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62201877A Pending JPS6447850A (en) | 1987-08-14 | 1987-08-14 | Manufacture of thermoelement |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6447850A (ja) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02162778A (ja) * | 1988-12-16 | 1990-06-22 | Ube Ind Ltd | 熱電変換材料用粉末の処理方法 |
JPH02267259A (ja) * | 1989-04-05 | 1990-11-01 | Jeol Ltd | 熱プラズマ蒸発法による成膜方法 |
US6324428B1 (en) | 1999-03-30 | 2001-11-27 | Pacesetter, Inc. | Implantable medical device having an improved electronic assembly for increasing packaging density and enhancing component protection |
WO2003052159A1 (fr) * | 2001-12-19 | 2003-06-26 | Japan Science And Technology Agency | Couche de ferrosiliciure amorphe presentant des caracteristiques semiconductrices et procede de production de ladite couche |
-
1987
- 1987-08-14 JP JP62201877A patent/JPS6447850A/ja active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02162778A (ja) * | 1988-12-16 | 1990-06-22 | Ube Ind Ltd | 熱電変換材料用粉末の処理方法 |
JPH02267259A (ja) * | 1989-04-05 | 1990-11-01 | Jeol Ltd | 熱プラズマ蒸発法による成膜方法 |
US6324428B1 (en) | 1999-03-30 | 2001-11-27 | Pacesetter, Inc. | Implantable medical device having an improved electronic assembly for increasing packaging density and enhancing component protection |
WO2003052159A1 (fr) * | 2001-12-19 | 2003-06-26 | Japan Science And Technology Agency | Couche de ferrosiliciure amorphe presentant des caracteristiques semiconductrices et procede de production de ladite couche |
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