JPS64453A - Foreign matter detector - Google Patents

Foreign matter detector

Info

Publication number
JPS64453A
JPS64453A JP63135484A JP13548488A JPS64453A JP S64453 A JPS64453 A JP S64453A JP 63135484 A JP63135484 A JP 63135484A JP 13548488 A JP13548488 A JP 13548488A JP S64453 A JPS64453 A JP S64453A
Authority
JP
Japan
Prior art keywords
substrate
foreign matter
light
pellicle
detected
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP63135484A
Other languages
English (en)
Other versions
JPH0312252B2 (ja
JPH01453A (ja
Inventor
Yukio Uto
Masataka Shiba
Mitsuyoshi Koizumi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP63135484A priority Critical patent/JPS64453A/ja
Publication of JPH01453A publication Critical patent/JPH01453A/ja
Publication of JPS64453A publication Critical patent/JPS64453A/ja
Publication of JPH0312252B2 publication Critical patent/JPH0312252B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
JP63135484A 1988-06-03 1988-06-03 Foreign matter detector Granted JPS64453A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP63135484A JPS64453A (en) 1988-06-03 1988-06-03 Foreign matter detector

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP63135484A JPS64453A (en) 1988-06-03 1988-06-03 Foreign matter detector

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP57192462A Division JPS5982727A (ja) 1982-11-04 1982-11-04 異物検出方法及びその装置

Publications (3)

Publication Number Publication Date
JPH01453A JPH01453A (ja) 1989-01-05
JPS64453A true JPS64453A (en) 1989-01-05
JPH0312252B2 JPH0312252B2 (ja) 1991-02-19

Family

ID=15152800

Family Applications (1)

Application Number Title Priority Date Filing Date
JP63135484A Granted JPS64453A (en) 1988-06-03 1988-06-03 Foreign matter detector

Country Status (1)

Country Link
JP (1) JPS64453A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5331396A (en) * 1991-10-08 1994-07-19 Matsushita Electric Industrial Co., Ltd. Foreign matter detection device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5331396A (en) * 1991-10-08 1994-07-19 Matsushita Electric Industrial Co., Ltd. Foreign matter detection device

Also Published As

Publication number Publication date
JPH0312252B2 (ja) 1991-02-19

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