JPS6445038A - Manufacture of electron tube cathode - Google Patents
Manufacture of electron tube cathodeInfo
- Publication number
- JPS6445038A JPS6445038A JP20254087A JP20254087A JPS6445038A JP S6445038 A JPS6445038 A JP S6445038A JP 20254087 A JP20254087 A JP 20254087A JP 20254087 A JP20254087 A JP 20254087A JP S6445038 A JPS6445038 A JP S6445038A
- Authority
- JP
- Japan
- Prior art keywords
- photoresist
- layer
- layers
- substance
- cathode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To improve clearness of a cathode pattern to be formed, by using a photoresist containing material powder of electron radiant substance and another photoresist not containing it and piling them together and next by performing development with supersonic waves used jointly. CONSTITUTION:An upper surface of a base metal 10 on a substrate 1 is first coated with a first layer 21 of a photoresist (a photosensitive high-molecular material) containing a substance which emits electrons when being used as a cathode, for example, alkaline earth metal carbonate powder and then dried. In succession a second layer 22 of another photoresist not containing the electron radiant substance is formed by a coating/drying process. Photosensitive high- molecules in both the layers should be preferably of the same species. A desired pattern is formed on these two photoresist layers by exposure and the layers are developed in water by application of supersonic vibration. The layer 22 is clearly developed and it functions to assist clearness upon the development of the layer 21. The supersonic vibration prevents needless matters from remaining so as to avoid fogging.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20254087A JPS6445038A (en) | 1987-08-13 | 1987-08-13 | Manufacture of electron tube cathode |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20254087A JPS6445038A (en) | 1987-08-13 | 1987-08-13 | Manufacture of electron tube cathode |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6445038A true JPS6445038A (en) | 1989-02-17 |
Family
ID=16459194
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20254087A Pending JPS6445038A (en) | 1987-08-13 | 1987-08-13 | Manufacture of electron tube cathode |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6445038A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8844686B2 (en) | 2009-05-29 | 2014-09-30 | Miba Frictec Gmbh | Friction element |
-
1987
- 1987-08-13 JP JP20254087A patent/JPS6445038A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US8844686B2 (en) | 2009-05-29 | 2014-09-30 | Miba Frictec Gmbh | Friction element |
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