JPS6445038A - Manufacture of electron tube cathode - Google Patents

Manufacture of electron tube cathode

Info

Publication number
JPS6445038A
JPS6445038A JP20254087A JP20254087A JPS6445038A JP S6445038 A JPS6445038 A JP S6445038A JP 20254087 A JP20254087 A JP 20254087A JP 20254087 A JP20254087 A JP 20254087A JP S6445038 A JPS6445038 A JP S6445038A
Authority
JP
Japan
Prior art keywords
photoresist
layer
layers
substance
cathode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20254087A
Other languages
Japanese (ja)
Inventor
Shinjiro Umeya
Kenichi Kanna
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sony Corp
Original Assignee
Sony Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sony Corp filed Critical Sony Corp
Priority to JP20254087A priority Critical patent/JPS6445038A/en
Publication of JPS6445038A publication Critical patent/JPS6445038A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE:To improve clearness of a cathode pattern to be formed, by using a photoresist containing material powder of electron radiant substance and another photoresist not containing it and piling them together and next by performing development with supersonic waves used jointly. CONSTITUTION:An upper surface of a base metal 10 on a substrate 1 is first coated with a first layer 21 of a photoresist (a photosensitive high-molecular material) containing a substance which emits electrons when being used as a cathode, for example, alkaline earth metal carbonate powder and then dried. In succession a second layer 22 of another photoresist not containing the electron radiant substance is formed by a coating/drying process. Photosensitive high- molecules in both the layers should be preferably of the same species. A desired pattern is formed on these two photoresist layers by exposure and the layers are developed in water by application of supersonic vibration. The layer 22 is clearly developed and it functions to assist clearness upon the development of the layer 21. The supersonic vibration prevents needless matters from remaining so as to avoid fogging.
JP20254087A 1987-08-13 1987-08-13 Manufacture of electron tube cathode Pending JPS6445038A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20254087A JPS6445038A (en) 1987-08-13 1987-08-13 Manufacture of electron tube cathode

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20254087A JPS6445038A (en) 1987-08-13 1987-08-13 Manufacture of electron tube cathode

Publications (1)

Publication Number Publication Date
JPS6445038A true JPS6445038A (en) 1989-02-17

Family

ID=16459194

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20254087A Pending JPS6445038A (en) 1987-08-13 1987-08-13 Manufacture of electron tube cathode

Country Status (1)

Country Link
JP (1) JPS6445038A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8844686B2 (en) 2009-05-29 2014-09-30 Miba Frictec Gmbh Friction element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8844686B2 (en) 2009-05-29 2014-09-30 Miba Frictec Gmbh Friction element

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