JPS644471A - Nongaseous ion plating method and equipment therefor - Google Patents
Nongaseous ion plating method and equipment thereforInfo
- Publication number
- JPS644471A JPS644471A JP15742087A JP15742087A JPS644471A JP S644471 A JPS644471 A JP S644471A JP 15742087 A JP15742087 A JP 15742087A JP 15742087 A JP15742087 A JP 15742087A JP S644471 A JPS644471 A JP S644471A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film formation
- nongaseous
- formation material
- ion plating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15742087A JPS644471A (en) | 1987-06-24 | 1987-06-24 | Nongaseous ion plating method and equipment therefor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP15742087A JPS644471A (en) | 1987-06-24 | 1987-06-24 | Nongaseous ion plating method and equipment therefor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS644471A true JPS644471A (en) | 1989-01-09 |
Family
ID=15649242
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP15742087A Pending JPS644471A (en) | 1987-06-24 | 1987-06-24 | Nongaseous ion plating method and equipment therefor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS644471A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100384449B1 (ko) * | 1999-12-13 | 2003-05-22 | 재단법인 포항산업과학연구원 | 밀착력 및 증착효율이 향상된 알루미늄 피막의 제조방법 |
-
1987
- 1987-06-24 JP JP15742087A patent/JPS644471A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100384449B1 (ko) * | 1999-12-13 | 2003-05-22 | 재단법인 포항산업과학연구원 | 밀착력 및 증착효율이 향상된 알루미늄 피막의 제조방법 |
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