JPS6443950A - Microwave ion source - Google Patents

Microwave ion source

Info

Publication number
JPS6443950A
JPS6443950A JP19830787A JP19830787A JPS6443950A JP S6443950 A JPS6443950 A JP S6443950A JP 19830787 A JP19830787 A JP 19830787A JP 19830787 A JP19830787 A JP 19830787A JP S6443950 A JPS6443950 A JP S6443950A
Authority
JP
Japan
Prior art keywords
microwave
plasma
impedance matching
window part
inlet window
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19830787A
Other languages
English (en)
Inventor
Masaru Shimada
Yasuhiro Torii
Iwao Watanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP19830787A priority Critical patent/JPS6443950A/ja
Publication of JPS6443950A publication Critical patent/JPS6443950A/ja
Pending legal-status Critical Current

Links

JP19830787A 1987-08-10 1987-08-10 Microwave ion source Pending JPS6443950A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19830787A JPS6443950A (en) 1987-08-10 1987-08-10 Microwave ion source

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19830787A JPS6443950A (en) 1987-08-10 1987-08-10 Microwave ion source

Publications (1)

Publication Number Publication Date
JPS6443950A true JPS6443950A (en) 1989-02-16

Family

ID=16388956

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19830787A Pending JPS6443950A (en) 1987-08-10 1987-08-10 Microwave ion source

Country Status (1)

Country Link
JP (1) JPS6443950A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01120738A (ja) * 1987-11-04 1989-05-12 Nissin Electric Co Ltd マイクロ波イオン源
EP0586579A1 (en) * 1991-05-24 1994-03-16 Lam Research Corporation Window for microwave plasma processing device
US5587039A (en) * 1992-01-09 1996-12-24 Varian Associates, Inc. Plasma etch equipment
US8008608B2 (en) * 2005-10-21 2011-08-30 Deutsches Zentrum fur Luft- und Raumfahrt E.V. (DRL E.V.) Microwave autoclave

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60264032A (ja) * 1984-06-11 1985-12-27 Nippon Telegr & Teleph Corp <Ntt> マイクロ波イオン源

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60264032A (ja) * 1984-06-11 1985-12-27 Nippon Telegr & Teleph Corp <Ntt> マイクロ波イオン源

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01120738A (ja) * 1987-11-04 1989-05-12 Nissin Electric Co Ltd マイクロ波イオン源
EP0586579A1 (en) * 1991-05-24 1994-03-16 Lam Research Corporation Window for microwave plasma processing device
EP0586579A4 (en) * 1991-05-24 1994-10-19 Lam Res Corp WINDOW FOR MICROWAVE PLASMA MACHINING DEVICE.
US5587039A (en) * 1992-01-09 1996-12-24 Varian Associates, Inc. Plasma etch equipment
US8008608B2 (en) * 2005-10-21 2011-08-30 Deutsches Zentrum fur Luft- und Raumfahrt E.V. (DRL E.V.) Microwave autoclave

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