JPS6442851A - Manufacture of integrated circuit - Google Patents

Manufacture of integrated circuit

Info

Publication number
JPS6442851A
JPS6442851A JP62200177A JP20017787A JPS6442851A JP S6442851 A JPS6442851 A JP S6442851A JP 62200177 A JP62200177 A JP 62200177A JP 20017787 A JP20017787 A JP 20017787A JP S6442851 A JPS6442851 A JP S6442851A
Authority
JP
Japan
Prior art keywords
polycrystalline silicon
resistance value
film
silicon film
hydrogen
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62200177A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0579184B2 (enrdf_load_stackoverflow
Inventor
Fumihiko Goto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp filed Critical NEC Corp
Priority to JP62200177A priority Critical patent/JPS6442851A/ja
Publication of JPS6442851A publication Critical patent/JPS6442851A/ja
Publication of JPH0579184B2 publication Critical patent/JPH0579184B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP62200177A 1987-08-10 1987-08-10 Manufacture of integrated circuit Granted JPS6442851A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62200177A JPS6442851A (en) 1987-08-10 1987-08-10 Manufacture of integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62200177A JPS6442851A (en) 1987-08-10 1987-08-10 Manufacture of integrated circuit

Publications (2)

Publication Number Publication Date
JPS6442851A true JPS6442851A (en) 1989-02-15
JPH0579184B2 JPH0579184B2 (enrdf_load_stackoverflow) 1993-11-01

Family

ID=16420074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62200177A Granted JPS6442851A (en) 1987-08-10 1987-08-10 Manufacture of integrated circuit

Country Status (1)

Country Link
JP (1) JPS6442851A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5420053A (en) * 1993-05-07 1995-05-30 Nec Corporation Method for manufacturing semiconductor device having bipolar transistor and polycrystalline silicon resistor
WO1997007545A1 (fr) * 1995-08-11 1997-02-27 Seiko Instruments R & D Center Inc. Procede de fabrication d'un circuit integre a semi-conducteur
JPH09121024A (ja) * 1995-10-25 1997-05-06 Nec Corp 半導体装置とその製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5420053A (en) * 1993-05-07 1995-05-30 Nec Corporation Method for manufacturing semiconductor device having bipolar transistor and polycrystalline silicon resistor
WO1997007545A1 (fr) * 1995-08-11 1997-02-27 Seiko Instruments R & D Center Inc. Procede de fabrication d'un circuit integre a semi-conducteur
JPH09121024A (ja) * 1995-10-25 1997-05-06 Nec Corp 半導体装置とその製造方法

Also Published As

Publication number Publication date
JPH0579184B2 (enrdf_load_stackoverflow) 1993-11-01

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees