JPS6442394A - Semiconductor growing apparatus - Google Patents
Semiconductor growing apparatusInfo
- Publication number
- JPS6442394A JPS6442394A JP19626187A JP19626187A JPS6442394A JP S6442394 A JPS6442394 A JP S6442394A JP 19626187 A JP19626187 A JP 19626187A JP 19626187 A JP19626187 A JP 19626187A JP S6442394 A JPS6442394 A JP S6442394A
- Authority
- JP
- Japan
- Prior art keywords
- silane
- atomic hydrogen
- generated
- substrate
- hydrogen
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title 1
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 abstract 6
- 229910000077 silane Inorganic materials 0.000 abstract 6
- YZCKVEUIGOORGS-UHFFFAOYSA-N Hydrogen atom Chemical compound [H] YZCKVEUIGOORGS-UHFFFAOYSA-N 0.000 abstract 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 4
- 229910052710 silicon Inorganic materials 0.000 abstract 4
- 239000010703 silicon Substances 0.000 abstract 4
- 239000000758 substrate Substances 0.000 abstract 4
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 abstract 2
- 238000010438 heat treatment Methods 0.000 abstract 2
- 229910052739 hydrogen Inorganic materials 0.000 abstract 2
- 239000001257 hydrogen Substances 0.000 abstract 2
- 239000007787 solid Substances 0.000 abstract 2
- 238000011109 contamination Methods 0.000 abstract 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052721 tungsten Inorganic materials 0.000 abstract 1
- 239000010937 tungsten Substances 0.000 abstract 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19626187A JPS6442394A (en) | 1987-08-07 | 1987-08-07 | Semiconductor growing apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19626187A JPS6442394A (en) | 1987-08-07 | 1987-08-07 | Semiconductor growing apparatus |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6442394A true JPS6442394A (en) | 1989-02-14 |
| JPH054958B2 JPH054958B2 (https=) | 1993-01-21 |
Family
ID=16354866
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19626187A Granted JPS6442394A (en) | 1987-08-07 | 1987-08-07 | Semiconductor growing apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6442394A (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5720340A (en) * | 1995-07-20 | 1998-02-24 | Denso Corporation | Laminated type heat exchanger |
-
1987
- 1987-08-07 JP JP19626187A patent/JPS6442394A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5720340A (en) * | 1995-07-20 | 1998-02-24 | Denso Corporation | Laminated type heat exchanger |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH054958B2 (https=) | 1993-01-21 |
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