JPS6442122A - Vertical-type reaction device - Google Patents
Vertical-type reaction deviceInfo
- Publication number
- JPS6442122A JPS6442122A JP19851087A JP19851087A JPS6442122A JP S6442122 A JPS6442122 A JP S6442122A JP 19851087 A JP19851087 A JP 19851087A JP 19851087 A JP19851087 A JP 19851087A JP S6442122 A JPS6442122 A JP S6442122A
- Authority
- JP
- Japan
- Prior art keywords
- reaction
- carrier
- wafer
- reaction device
- jig
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To enhance the operation efficiency as a reaction device by a method wherein a carrier transfer mechanism is installed between a reaction part and a clean bench as a wafer exchange space and a wafer exchange mechanism is separated from the reaction part so that an occupied duration of the reaction device can be shortened. CONSTITUTION:A jig and a mechanism which are used to transfer a wafer-mounting carrier 1 by shifting it horizontally, raising or lowering it and turning it while the wafer-mounting carrier 1 is suspended are installed in a reaction device. A hole 16 for insertion of a suspension jig 16 is made in a top plate of the carrier 1; the jig can be taken out from a reaction tube in a hightemperature state due to a heat treatment; a wafer can be cooled on a clean bench outside a reaction chamber and can be exchanged; at the same time, a second carrier where another wafer has been set in advance is inserted into a reaction tube, and a film is formed. A plate or a freely opened and shut umbrella-like mechanism which is used to suspend the carrier 1 is installed at a tip part of the suspension jig 15; the suspension jig 15 can be turned for an alignment operation when it is to be suspended. By this setup, an operation rate of the reaction tube can be increased, and the operation efficiency as the reaction device can be enhanced.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19851087A JPS6442122A (en) | 1987-08-07 | 1987-08-07 | Vertical-type reaction device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19851087A JPS6442122A (en) | 1987-08-07 | 1987-08-07 | Vertical-type reaction device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6442122A true JPS6442122A (en) | 1989-02-14 |
Family
ID=16392337
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19851087A Pending JPS6442122A (en) | 1987-08-07 | 1987-08-07 | Vertical-type reaction device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6442122A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5382128A (en) * | 1993-03-03 | 1995-01-17 | Takahashi; Kiyoshi | Wafer transfer device |
-
1987
- 1987-08-07 JP JP19851087A patent/JPS6442122A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5382128A (en) * | 1993-03-03 | 1995-01-17 | Takahashi; Kiyoshi | Wafer transfer device |
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