JPS644045A - Inspection device - Google Patents

Inspection device

Info

Publication number
JPS644045A
JPS644045A JP15765287A JP15765287A JPS644045A JP S644045 A JPS644045 A JP S644045A JP 15765287 A JP15765287 A JP 15765287A JP 15765287 A JP15765287 A JP 15765287A JP S644045 A JPS644045 A JP S644045A
Authority
JP
Japan
Prior art keywords
inspected
reflected light
threshold value
scattered light
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15765287A
Other languages
English (en)
Other versions
JP2564310B2 (ja
Inventor
Yoshikazu Tanabe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP62157652A priority Critical patent/JP2564310B2/ja
Publication of JPS644045A publication Critical patent/JPS644045A/ja
Application granted granted Critical
Publication of JP2564310B2 publication Critical patent/JP2564310B2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP62157652A 1987-06-26 1987-06-26 外観検査装置 Expired - Fee Related JP2564310B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62157652A JP2564310B2 (ja) 1987-06-26 1987-06-26 外観検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62157652A JP2564310B2 (ja) 1987-06-26 1987-06-26 外観検査装置

Publications (2)

Publication Number Publication Date
JPS644045A true JPS644045A (en) 1989-01-09
JP2564310B2 JP2564310B2 (ja) 1996-12-18

Family

ID=15654407

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62157652A Expired - Fee Related JP2564310B2 (ja) 1987-06-26 1987-06-26 外観検査装置

Country Status (1)

Country Link
JP (1) JP2564310B2 (ja)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5127380A (en) * 1988-05-30 1992-07-07 Yamaha Hatsudoki Kabushiki Kaisha Combustion chamber and valve operating mechanism for multi-valve engine
US5163390A (en) * 1989-11-29 1992-11-17 Yamaha Hatsudoki Kabushiki Kaisha Rocker arm arrangement for single cam multi-valve engine
US5291868A (en) * 1989-11-29 1994-03-08 Yamaha Motor Co. Ltd. Single overhead cam multi-valve engine
WO2003073085A1 (fr) * 2002-02-26 2003-09-04 Matsushita Electric Industrial Co., Ltd. Dispositif d'inspection superficielle de corps etrangers
CN112816486A (zh) * 2020-12-31 2021-05-18 立讯智造(浙江)有限公司 检测治具

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015114065A1 (de) * 2015-08-25 2017-03-02 Brodmann Technologies GmbH Verfahren und Einrichtung zur berührungslosen Beurteilung der Oberflächenbeschaffenheit eines Wafers

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6165146A (ja) * 1984-09-06 1986-04-03 Toshiba Corp 表面検査装置
JPS61175788A (ja) * 1985-01-29 1986-08-07 Nichiden Mach Ltd 画像２値化回路
JPS61292931A (ja) * 1985-06-21 1986-12-23 Hitachi Ltd 欠陥検査方法及び装置

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6165146A (ja) * 1984-09-06 1986-04-03 Toshiba Corp 表面検査装置
JPS61175788A (ja) * 1985-01-29 1986-08-07 Nichiden Mach Ltd 画像２値化回路
JPS61292931A (ja) * 1985-06-21 1986-12-23 Hitachi Ltd 欠陥検査方法及び装置

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5127380A (en) * 1988-05-30 1992-07-07 Yamaha Hatsudoki Kabushiki Kaisha Combustion chamber and valve operating mechanism for multi-valve engine
US5163390A (en) * 1989-11-29 1992-11-17 Yamaha Hatsudoki Kabushiki Kaisha Rocker arm arrangement for single cam multi-valve engine
US5291868A (en) * 1989-11-29 1994-03-08 Yamaha Motor Co. Ltd. Single overhead cam multi-valve engine
WO2003073085A1 (fr) * 2002-02-26 2003-09-04 Matsushita Electric Industrial Co., Ltd. Dispositif d'inspection superficielle de corps etrangers
US7046354B2 (en) 2002-02-26 2006-05-16 Matsushita Electric Industrial Co., Ltd. Surface foreign matter inspecting device
CN112816486A (zh) * 2020-12-31 2021-05-18 立讯智造(浙江)有限公司 检测治具

Also Published As

Publication number Publication date
JP2564310B2 (ja) 1996-12-18

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees