JPS6437035U

JPS6437035U -

Info

Publication number: JPS6437035U
Application number: JP13139887U
Authority: JP
Priority date: 1987-08-31
Filing date: 1987-08-31
Publication date: 1989-03-06

Description

[Brief explanation of the drawing]

第１図は本考案の一実施例による装置の断面側
面図、第２図Ａ及び同図Ｂは第１図のＸ−Ｘ′線
及びＹ−Ｙ′線に沿つた各断面図、第３図は従来
装置の断面側面図、第４図は第３図の上部電極の
平面図、第５図乃至第７図は被処理体のエツチン
グ前と後を示す各断面図である。図中、１０１……ベルジヤ、１０１ａ……第１
の排気口、１０２……上部電極、１０２ａ……上
部電極板、１０２ａ_１……第２の排気口、１０２
ａ_２……ガス導入口、１０２ｂ……上部支持軸、
１０２ｂ_１……排気経路部、１０２ｂ_２……ガス
導入経路部、１０３……下部電極、１０３ａ……
下部電極板、１０３ｂ……下部支持軸、１０５…
…マニホールド、１０６……第１の排気量調整器
、１０７……第２の排気量調整器。 1 is a sectional side view of an apparatus according to an embodiment of the present invention, FIGS. 2A and 2B are sectional views taken along lines X-X' and Y-Y' in FIG. 4 is a plan view of the upper electrode of FIG. 3, and FIGS. 5 to 7 are sectional views showing the object to be processed before and after etching. In the figure, 101... Berjia, 101a... 1st
Exhaust port, 102... Upper electrode, 102a... Upper electrode plate, 102a ₁ ... Second exhaust port, 102
_a2 ...Gas inlet, 102b...Upper support shaft,
102b ₁ ...Exhaust path section, 102b ₂ ...Gas introduction path section, 103...Lower electrode, 103a...
Lower electrode plate, 103b... Lower support shaft, 105...
...manifold, 106...first displacement regulator, 107...second displacement regulator.

Claims

[Claims for Utility Model Registration] (1) A gas inlet for introducing a reaction gas into the bell gear, a support means disposed opposite to the gas inlet to support the object to be processed, and a means for evacuating the inside of the bell gear. In a plasma processing apparatus for plasma processing the object to be processed by converting a reaction gas introduced into the bell gear into gas plasma, the exhaust port relatively surrounds the outer periphery of the support means. It is composed of a first exhaust port and a second exhaust port disposed opposite to the center of the object to be processed supported by the support means, and the gas introduction port is arranged surrounding the second exhaust port. A plasma processing device characterized by: (2) Utility model registration claim 1, characterized in that it is provided with an exhaust amount adjusting means for individually adjusting the exhaust amount on the exhaust path led out from the first and second exhaust ports to the outside of the bell gear. The plasma processing apparatus described.