JPS6436770A - Production of silicon dioxide film containing phosphorus - Google Patents
Production of silicon dioxide film containing phosphorusInfo
- Publication number
- JPS6436770A JPS6436770A JP19062087A JP19062087A JPS6436770A JP S6436770 A JPS6436770 A JP S6436770A JP 19062087 A JP19062087 A JP 19062087A JP 19062087 A JP19062087 A JP 19062087A JP S6436770 A JPS6436770 A JP S6436770A
- Authority
- JP
- Japan
- Prior art keywords
- phosphorus
- treating liquid
- base material
- contg
- soln
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title abstract 10
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 title abstract 6
- 229910052698 phosphorus Inorganic materials 0.000 title abstract 6
- 239000011574 phosphorus Substances 0.000 title abstract 6
- 235000012239 silicon dioxide Nutrition 0.000 title abstract 5
- 239000000377 silicon dioxide Substances 0.000 title abstract 5
- 239000007788 liquid Substances 0.000 abstract 5
- 239000002585 base Substances 0.000 abstract 4
- 229910052681 coesite Inorganic materials 0.000 abstract 4
- 229910052906 cristobalite Inorganic materials 0.000 abstract 4
- 239000000463 material Substances 0.000 abstract 4
- 229910052682 stishovite Inorganic materials 0.000 abstract 4
- 229910052905 tridymite Inorganic materials 0.000 abstract 4
- 239000002253 acid Substances 0.000 abstract 3
- 230000001105 regulatory effect Effects 0.000 abstract 3
- 229910052783 alkali metal Inorganic materials 0.000 abstract 1
- 150000001340 alkali metals Chemical class 0.000 abstract 1
- 238000007654 immersion Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Surface Treatment Of Glass (AREA)
- Chemically Coating (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19062087A JPS6436770A (en) | 1987-07-30 | 1987-07-30 | Production of silicon dioxide film containing phosphorus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP19062087A JPS6436770A (en) | 1987-07-30 | 1987-07-30 | Production of silicon dioxide film containing phosphorus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6436770A true JPS6436770A (en) | 1989-02-07 |
JPH0567709B2 JPH0567709B2 (en, 2012) | 1993-09-27 |
Family
ID=16261101
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP19062087A Granted JPS6436770A (en) | 1987-07-30 | 1987-07-30 | Production of silicon dioxide film containing phosphorus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6436770A (en, 2012) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013113941A (ja) * | 2011-11-25 | 2013-06-10 | Mitsubishi Materials Corp | 反射防止膜付きガラス基材 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57196744A (en) * | 1981-05-29 | 1982-12-02 | Nippon Sheet Glass Co Ltd | Surface treatment of glass containing alkali metal |
JPS58161944A (ja) * | 1982-03-16 | 1983-09-26 | Nippon Sheet Glass Co Ltd | アルカリ金属を含むガラスの表面処理方法 |
JPS6033233A (ja) * | 1983-07-27 | 1985-02-20 | Nippon Sheet Glass Co Ltd | 酸化珪素被膜の製造方法 |
JPS6048740A (ja) * | 1983-08-29 | 1985-03-16 | 高橋 孝輔 | 陰茎の勃起助勢補助具 |
JPS62158136A (ja) * | 1985-12-27 | 1987-07-14 | Nippon Soda Co Ltd | ガラス基板 |
-
1987
- 1987-07-30 JP JP19062087A patent/JPS6436770A/ja active Granted
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS57196744A (en) * | 1981-05-29 | 1982-12-02 | Nippon Sheet Glass Co Ltd | Surface treatment of glass containing alkali metal |
JPS58161944A (ja) * | 1982-03-16 | 1983-09-26 | Nippon Sheet Glass Co Ltd | アルカリ金属を含むガラスの表面処理方法 |
JPS6033233A (ja) * | 1983-07-27 | 1985-02-20 | Nippon Sheet Glass Co Ltd | 酸化珪素被膜の製造方法 |
JPS6048740A (ja) * | 1983-08-29 | 1985-03-16 | 高橋 孝輔 | 陰茎の勃起助勢補助具 |
JPS62158136A (ja) * | 1985-12-27 | 1987-07-14 | Nippon Soda Co Ltd | ガラス基板 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2013113941A (ja) * | 2011-11-25 | 2013-06-10 | Mitsubishi Materials Corp | 反射防止膜付きガラス基材 |
Also Published As
Publication number | Publication date |
---|---|
JPH0567709B2 (en, 2012) | 1993-09-27 |
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