JPS6417871A - Production of silicon dioxide coated film - Google Patents
Production of silicon dioxide coated filmInfo
- Publication number
- JPS6417871A JPS6417871A JP17456187A JP17456187A JPS6417871A JP S6417871 A JPS6417871 A JP S6417871A JP 17456187 A JP17456187 A JP 17456187A JP 17456187 A JP17456187 A JP 17456187A JP S6417871 A JPS6417871 A JP S6417871A
- Authority
- JP
- Japan
- Prior art keywords
- silicon dioxide
- substrate
- coated film
- soln
- dioxide coated
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
Abstract
PURPOSE:To easily obtain the title dense silicon dioxide film at a low cost by bringing a processing soln. obtained by dissolving silicon dioxide in an aq. soln. of hydrofluosilicic acid kept at a specified temp. to supersaturation into contact with a substrate to deposit a silicon dioxide coated film on the substrate surface. CONSTITUTION:Silicon dioxide is dissolved in an aq. soln. of hydrofluosilicic acid having 3.5-5mol./l concn. to supersaturation to prepare the processing soln. The processing soln. is then brought into contact with a substrate (e.g., a glass substrate and a silicon substrate) to deposit the silicon dioxide coated film on the substrate surface, and the silicon dioxide coated film is produced. The substrate is dipped in a dip tank filled with the processing soln., and the substrate is appropriately brought into contact with the processing soln. Since the concn. of the hydrofluosilicic acid in the processing soln. is controlled to 3.5-5mol./l, the content of an OH group in the silicon dioxide coated film is reduced, and a dense coated film can be formed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17456187A JPS6417871A (en) | 1987-07-13 | 1987-07-13 | Production of silicon dioxide coated film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17456187A JPS6417871A (en) | 1987-07-13 | 1987-07-13 | Production of silicon dioxide coated film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6417871A true JPS6417871A (en) | 1989-01-20 |
Family
ID=15980710
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17456187A Pending JPS6417871A (en) | 1987-07-13 | 1987-07-13 | Production of silicon dioxide coated film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6417871A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5153035A (en) * | 1990-09-29 | 1992-10-06 | Nippon Sheet Glass Co., Ltd. | Process for forming silica films |
US5326720A (en) * | 1990-10-25 | 1994-07-05 | Nippon Sheet Glass Co., Ltd. | Method for producing silicon dioxide film which prevents escape of Si component to the environment |
WO2011006089A3 (en) * | 2009-07-10 | 2011-05-05 | Greg Caldwell Company, Llc | Coated glass bottles, encapsulated compact fluorescent bulbs and articles and methods of manufacture |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB626810A (en) * | 1946-08-16 | 1949-07-21 | Rca Corp | Process of depositing silica films |
JPS6033233A (en) * | 1983-07-27 | 1985-02-20 | Nippon Sheet Glass Co Ltd | Preparation of glass coated with silicon oxide |
-
1987
- 1987-07-13 JP JP17456187A patent/JPS6417871A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB626810A (en) * | 1946-08-16 | 1949-07-21 | Rca Corp | Process of depositing silica films |
JPS6033233A (en) * | 1983-07-27 | 1985-02-20 | Nippon Sheet Glass Co Ltd | Preparation of glass coated with silicon oxide |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5153035A (en) * | 1990-09-29 | 1992-10-06 | Nippon Sheet Glass Co., Ltd. | Process for forming silica films |
US5326720A (en) * | 1990-10-25 | 1994-07-05 | Nippon Sheet Glass Co., Ltd. | Method for producing silicon dioxide film which prevents escape of Si component to the environment |
WO2011006089A3 (en) * | 2009-07-10 | 2011-05-05 | Greg Caldwell Company, Llc | Coated glass bottles, encapsulated compact fluorescent bulbs and articles and methods of manufacture |
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