JPS6435975A - Method of manufacturing device from thin layer of superconducting material and device manufactured by the method - Google Patents
Method of manufacturing device from thin layer of superconducting material and device manufactured by the methodInfo
- Publication number
- JPS6435975A JPS6435975A JP63164791A JP16479188A JPS6435975A JP S6435975 A JPS6435975 A JP S6435975A JP 63164791 A JP63164791 A JP 63164791A JP 16479188 A JP16479188 A JP 16479188A JP S6435975 A JPS6435975 A JP S6435975A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- thin layer
- mesh parameter
- superconducting thin
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000463 material Substances 0.000 title abstract 6
- 238000004519 manufacturing process Methods 0.000 title abstract 2
- 238000000034 method Methods 0.000 title abstract 2
- 239000000758 substrate Substances 0.000 abstract 5
- 229910052788 barium Inorganic materials 0.000 abstract 2
- 229910052802 copper Inorganic materials 0.000 abstract 2
- 239000002994 raw material Substances 0.000 abstract 2
- 229910052746 lanthanum Inorganic materials 0.000 abstract 1
- 229910044991 metal oxide Inorganic materials 0.000 abstract 1
- 150000004706 metal oxides Chemical class 0.000 abstract 1
- 229910001404 rare earth metal oxide Inorganic materials 0.000 abstract 1
- 239000011343 solid material Substances 0.000 abstract 1
- 229910052727 yttrium Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
- H10N60/0716—Passivating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B1/00—Single-crystal growth directly from the solid state
- C30B1/02—Single-crystal growth directly from the solid state by thermal treatment, e.g. strain annealing
- C30B1/026—Solid phase epitaxial growth through a disordered intermediate layer
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/10—Inorganic compounds or compositions
- C30B29/16—Oxides
- C30B29/22—Complex oxides
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0296—Processes for depositing or forming copper oxide superconductor layers
- H10N60/0576—Processes for depositing or forming copper oxide superconductor layers characterised by the substrate
- H10N60/0604—Monocrystalline substrates, e.g. epitaxial growth
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
- Y10S505/729—Growing single crystal, e.g. epitaxy, bulk
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S505/00—Superconductor technology: apparatus, material, process
- Y10S505/725—Process of making or treating high tc, above 30 k, superconducting shaped material, article, or device
- Y10S505/73—Vacuum treating or coating
- Y10S505/732—Evaporative coating with superconducting material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Thermal Sciences (AREA)
- Inorganic Chemistry (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Containers, Films, And Cooling For Superconductive Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR8709462A FR2617644B1 (fr) | 1987-07-03 | 1987-07-03 | Procede de realisation de dispositifs en couches minces de materiaux supraconducteurs et dispositifs realises par ce procede |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6435975A true JPS6435975A (en) | 1989-02-07 |
Family
ID=9352851
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP63164791A Pending JPS6435975A (en) | 1987-07-03 | 1988-07-01 | Method of manufacturing device from thin layer of superconducting material and device manufactured by the method |
Country Status (4)
Country | Link |
---|---|
US (1) | US4983570A (ja) |
EP (1) | EP0300863A1 (ja) |
JP (1) | JPS6435975A (ja) |
FR (1) | FR2617644B1 (ja) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH03223108A (ja) * | 1990-01-26 | 1991-10-02 | Sharp Corp | 酸化物超伝導体 |
EP0491496B1 (en) * | 1990-12-19 | 1995-09-13 | AT&T Corp. | Article comprising a superconductor/insulator layer structure, and method of making the article |
KR20010079820A (ko) * | 1998-09-14 | 2001-08-22 | 추후제출 | 희토류 바륨-코퍼 혼합 조성을 갖는 초전도 구조체 |
US6624122B1 (en) * | 2000-06-21 | 2003-09-23 | The Regents Of The University Of California | High critical current superconducting tapes |
FR2817077B1 (fr) | 2000-11-17 | 2003-03-07 | Thomson Csf | Capacite variable commandable en tension par utilisation du phenomene de "blocage de coulomb" |
US6885570B2 (en) * | 2001-11-09 | 2005-04-26 | Interuniversitair Microelektronica Centrum vzw (IMEC vzw) | Simplified bottom electrode-barrier structure for making a ferroelectric capacitor stacked on a contact plug |
FR2880131B1 (fr) * | 2004-12-23 | 2007-03-16 | Thales Sa | Procede de mesure d'un champ magnetique faible et capteur de champ magnetique a sensibilite amelioree |
Family Cites Families (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6428875A (en) * | 1987-07-24 | 1989-01-31 | Hitachi Ltd | Superconducting multilayered film |
DE3726016A1 (de) * | 1987-08-05 | 1989-02-16 | Siemens Ag | Verfahren zur herstellung eines schichtartigen aufbaus aus einem oxidkeramischen supralteitermaterial |
-
1987
- 1987-07-03 FR FR8709462A patent/FR2617644B1/fr not_active Expired
-
1988
- 1988-06-30 US US07/214,047 patent/US4983570A/en not_active Expired - Fee Related
- 1988-07-01 EP EP88401709A patent/EP0300863A1/fr not_active Withdrawn
- 1988-07-01 JP JP63164791A patent/JPS6435975A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
US4983570A (en) | 1991-01-08 |
EP0300863A1 (fr) | 1989-01-25 |
FR2617644A1 (fr) | 1989-01-06 |
FR2617644B1 (fr) | 1989-10-20 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DE3877116T2 (de) | Koerper mit supraleitendem oxid und dessen herstellungsverfahren. | |
Ginley et al. | Growth of crystals and effects of oxygen annealing in the Bi-Ca-Sr-Cu-O and Tl-Ca-Ba-Cu-O superconductor system | |
JPS6435975A (en) | Method of manufacturing device from thin layer of superconducting material and device manufactured by the method | |
JPS6414814A (en) | Manufacture of oxide superconductive thin film | |
JPS6441282A (en) | Method of depositing superconducting oxide material thin layer | |
JPS5727079A (en) | Manufacture of josephson element of oxide superconductor | |
JPS6451680A (en) | Oxide ceramics laminated layer structure and its manufacture | |
DE68913787T2 (de) | Isolierende oxidische Zusammensetzung zur Verwendung in einer supraleitenden Anordnung. | |
AU595142B2 (en) | Method of making a body, and article comprising the body | |
JPS6457513A (en) | Superconducting wire and its manufacture | |
JPS6465718A (en) | Manufacture of ceramic superconductive wire | |
US6839578B2 (en) | Method of forming high temperature superconducting Josephson junction | |
DE3881589T2 (de) | Verfahren zur Herstellung supraleitender Kupferoxid-Schichten. | |
JPS6452340A (en) | Manufacture of superconductive fine wire | |
JPS6417314A (en) | Thin film superconductor | |
DE69222512T2 (de) | Supraleitendes Bauelement mit extrem dünnem supraleitendem Kanal aus supraleitendem Oxidmaterial | |
JPS6448316A (en) | Orientation type superconductive compound oxide material | |
JP2730558B2 (ja) | 超伝導薄膜の製造方法 | |
JPS6452326A (en) | Superconductor | |
KR0174382B1 (ko) | 고온 초전도 박막의 제조방법 | |
KR900701074A (ko) | 에피택셜 성장 | |
KR920008988A (ko) | 초전도 박막층의 제조방법 | |
JPS6441121A (en) | Manufacture of superconductive film | |
JPS6443926A (en) | Manufacture of ceramics superconductor film | |
JPS6452324A (en) | Superconductor |