JPS643165Y2 - - Google Patents

Info

Publication number
JPS643165Y2
JPS643165Y2 JP8462483U JP8462483U JPS643165Y2 JP S643165 Y2 JPS643165 Y2 JP S643165Y2 JP 8462483 U JP8462483 U JP 8462483U JP 8462483 U JP8462483 U JP 8462483U JP S643165 Y2 JPS643165 Y2 JP S643165Y2
Authority
JP
Japan
Prior art keywords
filament
power
current
circuit
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP8462483U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59190063U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8462483U priority Critical patent/JPS59190063U/ja
Publication of JPS59190063U publication Critical patent/JPS59190063U/ja
Application granted granted Critical
Publication of JPS643165Y2 publication Critical patent/JPS643165Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP8462483U 1983-06-03 1983-06-03 荷電粒子線装置のフイラメント切れ検出回路 Granted JPS59190063U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8462483U JPS59190063U (ja) 1983-06-03 1983-06-03 荷電粒子線装置のフイラメント切れ検出回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8462483U JPS59190063U (ja) 1983-06-03 1983-06-03 荷電粒子線装置のフイラメント切れ検出回路

Publications (2)

Publication Number Publication Date
JPS59190063U JPS59190063U (ja) 1984-12-17
JPS643165Y2 true JPS643165Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-01-26

Family

ID=30214584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8462483U Granted JPS59190063U (ja) 1983-06-03 1983-06-03 荷電粒子線装置のフイラメント切れ検出回路

Country Status (1)

Country Link
JP (1) JPS59190063U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS59190063U (ja) 1984-12-17

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