JPS59190063U - 荷電粒子線装置のフイラメント切れ検出回路 - Google Patents

荷電粒子線装置のフイラメント切れ検出回路

Info

Publication number
JPS59190063U
JPS59190063U JP8462483U JP8462483U JPS59190063U JP S59190063 U JPS59190063 U JP S59190063U JP 8462483 U JP8462483 U JP 8462483U JP 8462483 U JP8462483 U JP 8462483U JP S59190063 U JPS59190063 U JP S59190063U
Authority
JP
Japan
Prior art keywords
detection circuit
particle beam
breakage detection
filament breakage
charged particle
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP8462483U
Other languages
English (en)
Japanese (ja)
Other versions
JPS643165Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
正二 加藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP8462483U priority Critical patent/JPS59190063U/ja
Publication of JPS59190063U publication Critical patent/JPS59190063U/ja
Application granted granted Critical
Publication of JPS643165Y2 publication Critical patent/JPS643165Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electron Sources, Ion Sources (AREA)
JP8462483U 1983-06-03 1983-06-03 荷電粒子線装置のフイラメント切れ検出回路 Granted JPS59190063U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8462483U JPS59190063U (ja) 1983-06-03 1983-06-03 荷電粒子線装置のフイラメント切れ検出回路

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8462483U JPS59190063U (ja) 1983-06-03 1983-06-03 荷電粒子線装置のフイラメント切れ検出回路

Publications (2)

Publication Number Publication Date
JPS59190063U true JPS59190063U (ja) 1984-12-17
JPS643165Y2 JPS643165Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-01-26

Family

ID=30214584

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8462483U Granted JPS59190063U (ja) 1983-06-03 1983-06-03 荷電粒子線装置のフイラメント切れ検出回路

Country Status (1)

Country Link
JP (1) JPS59190063U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Also Published As

Publication number Publication date
JPS643165Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1989-01-26

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