JPS6431584A - Grooving method for optical integrated circuit - Google Patents

Grooving method for optical integrated circuit

Info

Publication number
JPS6431584A
JPS6431584A JP62186037A JP18603787A JPS6431584A JP S6431584 A JPS6431584 A JP S6431584A JP 62186037 A JP62186037 A JP 62186037A JP 18603787 A JP18603787 A JP 18603787A JP S6431584 A JPS6431584 A JP S6431584A
Authority
JP
Japan
Prior art keywords
laser beam
mask
optical fiber
wavelength
board
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62186037A
Other languages
Japanese (ja)
Inventor
Makoto Suzuki
Satoshi Watanabe
Takashi Tsukamoto
Hikoharu Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Brother Industries Ltd
Original Assignee
Brother Industries Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Brother Industries Ltd filed Critical Brother Industries Ltd
Priority to JP62186037A priority Critical patent/JPS6431584A/en
Publication of JPS6431584A publication Critical patent/JPS6431584A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3684—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier
    • G02B6/3688—Mechanical coupling means for mounting fibres to supporting carriers characterised by the manufacturing process of surface profiling of the supporting carrier using laser ablation
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/36—Removing material
    • B23K26/362—Laser etching
    • B23K26/364—Laser etching for making a groove or trench, e.g. for scribing a break initiation groove
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/30—Optical coupling means for use between fibre and thin-film device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3628—Mechanical coupling means for mounting fibres to supporting carriers
    • G02B6/3648—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures
    • G02B6/3652—Supporting carriers of a microbench type, i.e. with micromachined additional mechanical structures the additional structures being prepositioning mounting areas, allowing only movement in one dimension, e.g. grooves, trenches or vias in the microbench surface, i.e. self aligning supporting carriers

Landscapes

  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Optical Integrated Circuits (AREA)
  • Laser Beam Processing (AREA)

Abstract

PURPOSE:To easily form the groove in the necessary shape and dimension by closely fitting the laser beam reflecting mask consisting of a specific metal plate to the surface of the material having strong brittleness and hard to cut property and projecting a laser beam on the notch part of the mask. CONSTITUTION:The metal mask 22 reflecting the CO2 laser beam in >=5mum wavelength made of A, Cu, Ag, Au, etc., is closely fitted to the surface of the SiO2 and LiNbO3 optical integrated circuit board 10 which is brittle and hard to cut in order to connect an optical fiber 14 to the light wave guide path 18 of the board 10 and a notch part 22a is formed by notching the mask of the part inserting the optical fiber 14. The surface of the board 10 is scanned by the work head 24 of a CO gas laser machine to form a groove 12 by evaporating the notch 22a and after bringing the tip core 14a of the optical fiber 14 into contact with the end 18a of the light wave guide path 18 the both are fixed with their adhesion by an ultraviolet ray hardening resin, etc. In the case of using the CO2 laser beam of 10.6mum wavelength the thin sheet of a ceramic, etc., having a high reflection rate is used for the laser beam in the wavelength thereof as the mask material 22.
JP62186037A 1987-07-24 1987-07-24 Grooving method for optical integrated circuit Pending JPS6431584A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62186037A JPS6431584A (en) 1987-07-24 1987-07-24 Grooving method for optical integrated circuit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62186037A JPS6431584A (en) 1987-07-24 1987-07-24 Grooving method for optical integrated circuit

Publications (1)

Publication Number Publication Date
JPS6431584A true JPS6431584A (en) 1989-02-01

Family

ID=16181295

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62186037A Pending JPS6431584A (en) 1987-07-24 1987-07-24 Grooving method for optical integrated circuit

Country Status (1)

Country Link
JP (1) JPS6431584A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012243883A (en) * 2011-05-18 2012-12-10 Ngk Spark Plug Co Ltd Method of manufacturing multiple patterning wiring board

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012243883A (en) * 2011-05-18 2012-12-10 Ngk Spark Plug Co Ltd Method of manufacturing multiple patterning wiring board

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